{"id":"W2035785945","doi":"10.4028/www.scientific.net/msf.467-470.1339","title":"Abnormal Grain Growth in Electrochemically Deposited Cu Films","year":2004,"lang":"en","type":"article","venue":"Materials science forum","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":22,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Materials science; Grain growth; Nanocrystalline material; Annealing (glass); Grain size; Abnormal grain growth; Grain boundary; Microstructure; Metallurgy; Chemical engineering; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001563579,0.000237166,0.0003222814,0.0002180814,0.0002896443,0.0004310551,0.001016491,0.0001040086,0.0008009639],"category_scores_gemma":[0.0004663427,0.0001867051,0.0000534059,0.000725799,0.0007405379,0.000740723,0.0003622354,0.0001144944,0.0002837513],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002478682,"about_ca_system_score_gemma":0.0003141126,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00151225,"about_ca_topic_score_gemma":0.0002166424,"domain_scores_codex":[0.996964,0.00005666232,0.000550174,0.000734566,0.0005421228,0.001152413],"domain_scores_gemma":[0.9991106,0.00003760555,0.0001177596,0.0003981094,0.0001510537,0.0001848121],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005779583,0.0001028992,0.0007805232,0.0000201427,8.047116e-7,0.00001416369,0.0002167855,0.00002162916,0.9957609,0.002898855,0.0000996125,0.00002593878],"study_design_scores_gemma":[0.0005246841,0.0001631544,0.003583654,0.00005789689,0.00000333436,0.00004878018,0.0001213376,0.00001953221,0.9888623,0.006314513,0.00003486844,0.0002658933],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9959308,0.00002418533,0.0002104911,0.001337403,0.001183624,0.0003105093,0.00002690594,0.0001308225,0.0008452915],"genre_scores_gemma":[0.9963773,0.000006646825,0.002976004,0.0004876986,0.00005269781,0.00004005071,0.000005135751,0.00001597747,0.00003845189],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006898497,"threshold_uncertainty_score":0.8769993,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005802800567149232,"score_gpt":0.2311989704601486,"score_spread":0.2253961698929993,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}