{"id":"W2035805583","doi":"10.1115/1.2917315","title":"A Submicron Multiaxis Positioning Stage for Micro- and Nanoscale Manufacturing Processes","year":2008,"lang":"en","type":"article","venue":"Journal of Manufacturing Science and Engineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Victoria","funders":"University of Illinois at Urbana-Champaign; National Science Foundation","keywords":"Nanoscopic scale; Materials science; Robustness (evolution); Nanowire; Finite element method; Microfluidics; Nanotechnology; Chip; Structural engineering; Engineering; Electrical engineering; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003654361,0.0001517331,0.0001866676,0.0004595345,0.0002213396,0.00009188103,0.0001608528,0.00004612523,0.000002075523],"category_scores_gemma":[0.00005315145,0.0001395128,0.00004091506,0.0001533637,0.0001085307,0.0006425588,0.00002809073,0.0001493598,1.937506e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005653963,"about_ca_system_score_gemma":0.00003683834,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003891584,"about_ca_topic_score_gemma":5.81447e-7,"domain_scores_codex":[0.9990857,0.000003206304,0.0002769546,0.0001465269,0.000212873,0.0002747762],"domain_scores_gemma":[0.9995257,0.00006480861,0.00007651214,0.00008670138,0.0001086982,0.0001375319],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004224442,0.00004816175,0.00143983,0.001831497,0.00008511219,0.00004571787,0.002974769,0.02646199,0.9494048,0.00005173379,0.0003114347,0.01730265],"study_design_scores_gemma":[0.0002603534,0.00006120806,0.01372568,0.0001229225,0.0000110572,0.0003343941,0.00007387118,0.001671139,0.9787856,0.00001647115,0.004751505,0.0001858163],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9754779,0.0009014381,0.02315412,0.0000380865,0.0001336899,0.0001214579,0.000004417094,0.0001180278,0.00005088234],"genre_scores_gemma":[0.9723892,0.0007591584,0.0267165,0.00001958681,0.00006585284,0.000007115137,4.611148e-7,0.00001976259,0.00002233552],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02938072,"threshold_uncertainty_score":0.5689168,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008406850501567802,"score_gpt":0.2091324316433916,"score_spread":0.2007255811418238,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}