{"id":"W2035844061","doi":"10.1007/s00542-006-0213-0","title":"Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating","year":2006,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Saskatchewan","funders":"","keywords":"Electroplating; Cantilever; Materials science; Microelectromechanical systems; Fabrication; Capacitor; Lithography; Capacitance; Resist; Variable capacitor; Optoelectronics; Layer (electronics); Plating (geology); LIGA; Composite material; Electrical engineering; Electrode; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002001607,0.0003042876,0.0003545891,0.0002548596,0.0004828095,0.0006179102,0.0006349597,0.0003711106,0.00261795],"category_scores_gemma":[0.0003628237,0.0003422406,0.0001548751,0.0003634764,0.0002940368,0.0004357423,0.0003533271,0.0004993601,0.0006419359],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005469418,"about_ca_system_score_gemma":0.0006567664,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001137529,"about_ca_topic_score_gemma":0.00315136,"domain_scores_codex":[0.9998447,0.000005584391,0.000007959373,0.00003653122,0.00006854727,0.00003668539],"domain_scores_gemma":[0.9998597,0.00003610895,0.00002767043,0.00003111549,0.00002898557,0.00001641796],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003979085,0.00001284901,0.0001008972,0.00008200886,0.000008042055,0.00007848547,0.00003332516,0.0002763753,0.990599,0.001129895,0.000593868,0.007045467],"study_design_scores_gemma":[0.00001475284,0.00004932893,0.001031443,0.000003555923,0.000006928571,0.00008719718,0.00001265326,0.0009268398,0.9917413,0.0001485339,0.005970236,0.000007269824],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8810918,0.003648565,0.08766554,0.0006489173,0.0005752983,0.0002755485,0.001583131,0.001423581,0.02308755],"genre_scores_gemma":[0.910218,0.001455119,0.07442895,0.0001515441,0.00005084392,0.0001282348,0.0005132608,0.0001779538,0.01287602],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00261795,"threshold_uncertainty_score":0.008757949,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00234532077078986,"score_gpt":0.165381675334107,"score_spread":0.1630363545633171,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}