{"id":"W2035948999","doi":"10.4028/www.scientific.net/amr.324.265","title":"Implantation of Nitrogen Atoms in 4H-SiC Epitaxial Layers: A Comparison between Standard and Plasma Immersion Processes","year":2011,"lang":"en","type":"article","venue":"Advanced materials research","topic":"Silicon Carbide Semiconductor Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Saint Paul University","funders":"","keywords":"Materials science; Annealing (glass); Silicon carbide; Ion implantation; Plasma-immersion ion implantation; Epitaxy; Nitrogen; Plasma; Sheet resistance; Analytical Chemistry (journal); Dopant; Carbide; Resistive touchscreen; Ion beam; Ion; Metallurgy; Doping; Optoelectronics; Composite material; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002240106,0.0002390765,0.0001840992,0.0001660196,0.0001178537,0.0002247946,0.000307158,0.0002834901,0.0005064952],"category_scores_gemma":[0.0003521338,0.0001403612,0.0001601591,0.0001640215,0.0001695606,0.0002656922,0.0002235881,0.0001121283,0.00008583949],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001886116,"about_ca_system_score_gemma":0.0001106077,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006167485,"about_ca_topic_score_gemma":0.001138038,"domain_scores_codex":[0.9998456,0.00001859464,0.000009760894,0.00003499627,0.00006389064,0.00002708584],"domain_scores_gemma":[0.9998755,0.00004103324,0.00002524166,0.0000194097,0.00002851371,0.00001027567],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001685765,0.00001243956,0.0006335828,0.000106306,0.0000106807,0.00004784878,0.00003644176,0.0001677244,0.9950562,0.00004101613,0.00002291068,0.003696271],"study_design_scores_gemma":[0.00001627335,0.0006424224,0.009822915,0.000006937437,0.00002954202,0.0002706796,0.00004106356,0.001460908,0.9863084,0.00003368737,0.001360051,0.000007239935],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9955065,0.001424949,0.002078332,0.00001184204,0.00001376866,0.00001623824,0.00007242055,0.00003190258,0.0008439553],"genre_scores_gemma":[0.9931335,0.001110533,0.004442325,0.00001111814,0.000008595004,0.00001589251,0.000167502,0.0000222411,0.001088322],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006167485,"threshold_uncertainty_score":0.001694381,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.08055973015328252,"score_gpt":0.3436949980233367,"score_spread":0.2631352678700541,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}