{"id":"W2035961242","doi":"10.1115/1.2789469","title":"Modeling and Control of Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties","year":2007,"lang":"en","type":"article","venue":"Journal of Dynamic Systems Measurement and Control","topic":"Control and Stability of Dynamical Systems","field":"Engineering","cited_by":28,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"Polytechnique Montréal","keywords":"Parasitic extraction; Microactuator; Parametric statistics; Control theory (sociology); Stability (learning theory); Microelectromechanical systems; Backstepping; Control engineering; Computer science; Interconnection; Engineering; Control (management); Electronic engineering; Adaptive control; Mathematics; Actuator; Materials science","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002791383,0.0004330662,0.0004563118,0.0002026447,0.000259053,0.0005812365,0.0006432774,0.0005670838,0.0005348417],"category_scores_gemma":[0.0004537859,0.0002548633,0.000386863,0.0001654619,0.0006305968,0.0003741267,0.0006034384,0.0003189499,0.0001111273],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003441084,"about_ca_system_score_gemma":0.0005204692,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.006267713,"about_ca_topic_score_gemma":0.002940753,"domain_scores_codex":[0.9998388,0.00003752228,0.000008497339,0.00003230344,0.00006700191,0.0000158574],"domain_scores_gemma":[0.9998604,0.00005125141,0.00003963221,0.00001475987,0.00002587628,0.000007968157],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00003897918,0.00001327805,0.0002279427,0.00002702101,0.00001741353,0.000105218,0.00003577763,0.9783941,0.01176178,0.004856558,0.0001093859,0.004412672],"study_design_scores_gemma":[0.000003352287,0.00001816458,0.00008831928,9.577554e-7,0.00000281266,0.000005833822,0.00000298428,0.998938,0.0005382566,0.000272918,0.0001262352,0.000002124796],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1901548,0.0005776154,0.8013674,0.0003339514,0.00008744322,0.00006611006,0.00009750588,0.0003734095,0.006941721],"genre_scores_gemma":[0.9879344,0.0002308757,0.009335606,0.00001939792,0.00001664349,0.00006571928,0.00002818151,0.00001041182,0.002358872],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.006267713,"threshold_uncertainty_score":0.0124625,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01123332513655953,"score_gpt":0.2155328046988998,"score_spread":0.2042994795623403,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}