{"id":"W2036520791","doi":"10.1088/0960-1317/16/10/026","title":"A planar self-sacrificial multilayer SU-8-based MEMS process utilizing a UV-blocking layer for the creation of freely moving parts","year":2006,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":52,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Blocking (statistics); Microelectromechanical systems; Planar; Layer (electronics); Process (computing); Materials science; Nanotechnology; Optoelectronics; Thin layer; Computer science; Electronic engineering; Engineering; Computer network; Operating system","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001504631,0.0002974246,0.0001754723,0.0002154182,0.0001564371,0.0002162717,0.0003417934,0.0002691089,0.0004875865],"category_scores_gemma":[0.0001565251,0.0002485366,0.0002812293,0.000114935,0.0002371156,0.0003082032,0.0002743605,0.0003535495,0.0002749683],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001542651,"about_ca_system_score_gemma":0.0001797164,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00009708022,"about_ca_topic_score_gemma":0.0003008173,"domain_scores_codex":[0.9998682,0.00001130382,0.000007633747,0.00002478574,0.00006684935,0.00002125206],"domain_scores_gemma":[0.9998903,0.00001946266,0.00003876642,0.00002770685,0.00001268372,0.00001114632],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001170664,0.000006321426,0.0001092568,0.00003910996,0.000003831587,0.0000358468,0.00001653669,0.0001371502,0.9944607,0.0002427727,0.0000570683,0.004879724],"study_design_scores_gemma":[0.000006318328,0.0001765132,0.001389898,0.00000441135,0.00001697461,0.0005757594,0.00001000381,0.001883382,0.9904402,0.00008447649,0.005402795,0.000009133289],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.8229415,0.002625474,0.168377,0.0001242076,0.0001750312,0.00009233195,0.0001615712,0.0005669681,0.004935963],"genre_scores_gemma":[0.861928,0.0009508476,0.1338589,0.00004038053,0.00002642173,0.00003597713,0.0001274724,0.00003782443,0.002994137],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.0004875865,"threshold_uncertainty_score":0.001631141,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01055201509681308,"score_gpt":0.2252540488378303,"score_spread":0.2147020337410172,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}