{"id":"W2036695983","doi":"10.1116/1.2713410","title":"Influence of the positive ion composition on the ion-assisted chemical etch yield of SrTiO3 films in Ar∕SF6 plasmas","year":2007,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique; Université de Montréal","funders":"","keywords":"Ion; Dissociation (chemistry); Plasma; Sputtering; Yield (engineering); Monatomic gas; Plasma etching; Chemistry; Analytical Chemistry (journal); Materials science; Atomic physics; Chemical physics; Etching (microfabrication); Thin film; Nanotechnology; Physical chemistry; Chromatography; Organic chemistry; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0009875135,0.0001575766,0.000327838,0.0006138372,0.0001579532,0.00002643158,0.0005556518,0.0001841364,0.0000179597],"category_scores_gemma":[0.0001191433,0.00009521062,0.0001152614,0.002074208,0.0006631002,0.000280833,0.00009188133,0.0006726244,0.000001338624],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006791756,"about_ca_system_score_gemma":0.00005486969,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003234174,"about_ca_topic_score_gemma":0.00001774404,"domain_scores_codex":[0.9984736,0.00002450975,0.0006674696,0.0001655762,0.0003928583,0.0002759432],"domain_scores_gemma":[0.99872,0.0003053767,0.000401255,0.0002426366,0.0002818621,0.0000488568],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004543375,0.00008528641,0.008646422,0.00001158054,0.00003576512,0.000005789303,0.0002555846,0.02082113,0.9692671,0.000443968,0.00003972416,0.0003421963],"study_design_scores_gemma":[0.0002152636,0.0001729524,0.07745428,0.000418214,0.00003559907,0.0001100987,0.001219536,0.00870642,0.9112312,0.0003072578,0.00001669665,0.0001124525],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.997799,0.0001829521,0.000243914,0.001331324,0.0001729511,0.0001051508,0.000009929953,0.00001884803,0.0001359007],"genre_scores_gemma":[0.9991995,0.0001216945,0.0006177308,0.0000329169,0.000009287844,0.000001654277,3.688704e-7,0.000007492398,0.000009397572],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06880786,"threshold_uncertainty_score":0.3882577,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006923015065327204,"score_gpt":0.2283879166350174,"score_spread":0.2214649015696902,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}