{"id":"W2037094614","doi":"10.1063/1.1924894","title":"Diffraction element assisted lithography: Pattern control for photonic crystal fabrication","year":2005,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Photonic Crystals and Applications","field":"Physics and Astronomy","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"","keywords":"Photoresist; Lithography; Diffraction; Photonic crystal; Materials science; Optics; Fabrication; Photonics; Optoelectronics; Photolithography; Maskless lithography; Nanolithography; Resist; Electron-beam lithography; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009281775,0.0002298833,0.0002210649,0.00003877494,0.0002357457,0.00007545753,0.0001719735,0.00003145084,0.0001076743],"category_scores_gemma":[6.370606e-7,0.0002403015,0.0002116234,0.0001718356,0.00004474708,0.0001240214,0.00002142038,0.0001448746,0.00003551301],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006717167,"about_ca_system_score_gemma":0.0000247596,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00006151693,"about_ca_topic_score_gemma":0.000002453877,"domain_scores_codex":[0.9987494,0.00001433519,0.0002998834,0.0003947369,0.0001769174,0.0003647748],"domain_scores_gemma":[0.9991705,0.00008557505,0.0002369438,0.0003703022,0.00005411672,0.00008256463],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00002632745,0.0003808046,0.001054471,0.00001244896,0.0001718299,4.373013e-8,0.0001160242,0.001273778,0.8244972,0.0123946,0.002970307,0.1571022],"study_design_scores_gemma":[0.01977771,0.0001871144,0.06406076,0.00007711121,0.001192498,0.00000222541,0.0009385179,0.04466015,0.2998901,0.01164585,0.553957,0.003610885],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3515388,0.000007884116,0.6445978,0.001030148,0.00005470433,0.001073559,0.0002113322,0.00006985349,0.001415836],"genre_scores_gemma":[0.9937423,0.000001430488,0.001226769,0.001487909,0.001018779,0.001945027,0.0005102935,0.00003946478,0.00002801295],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.6433711,"threshold_uncertainty_score":0.9799209,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009643909126086316,"score_gpt":0.238621971556087,"score_spread":0.2289780624300007,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}