{"id":"W2037637286","doi":"10.1016/j.apsusc.2008.05.171","title":"Thermal evolution of defects produced by implantation of H, D and He in Silicon","year":2008,"lang":"en","type":"article","venue":"Applied Surface Science","topic":"Muon and positron interactions and applications","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université de Montréal; Institut National de la Recherche Scientifique; McMaster University; Western University","funders":"","keywords":"Silicon; Ion implantation; Channelling; Annealing (glass); Materials science; Vacancy defect; Wafer; Impurity; Crystallographic defect; Void (composites); Annihilation; Positron; Recrystallization (geology); Silicon on insulator; Electron beam processing; Ion; Crystallography; Radiochemistry; Nanotechnology; Electron; Nuclear physics; Chemistry; Optoelectronics; Metallurgy; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001443274,0.0001441169,0.000189378,0.0002395936,0.000210385,0.0003332311,0.0002548426,0.0003033043,0.001961586],"category_scores_gemma":[0.0003698013,0.0001509124,0.0001436586,0.0002289175,0.0005054941,0.0002674048,0.0001504563,0.0001964571,0.0001526447],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004300591,"about_ca_system_score_gemma":0.0001639388,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001604581,"about_ca_topic_score_gemma":0.001311403,"domain_scores_codex":[0.9999315,0.000007173673,0.000003077418,0.00001586666,0.00001910795,0.00002330423],"domain_scores_gemma":[0.9998153,0.0000735779,0.00004146112,0.00001643377,0.00003483126,0.00001848414],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001236679,0.00004615114,0.004597039,0.00007376733,0.00002889552,0.0002513554,0.0001764968,0.003055788,0.9876528,0.00061035,0.0001554007,0.002115334],"study_design_scores_gemma":[0.00005821263,0.0005346052,0.0262248,0.000008066787,0.00003156456,0.000181009,0.0002086453,0.01671888,0.9549818,0.0001943757,0.0008385581,0.00001948202],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9989293,0.0001022682,0.000260442,0.00001124719,0.000003933521,0.000003074997,0.00006898789,0.00001144332,0.0006093394],"genre_scores_gemma":[0.9992762,0.00004080371,0.0001324827,0.000005306717,0.000001818053,0.000002557524,0.00006916609,0.000006941849,0.0004647041],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001961586,"threshold_uncertainty_score":0.006562173,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00786287605200823,"score_gpt":0.2264361015464963,"score_spread":0.2185732254944881,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}