{"id":"W2039315243","doi":"10.1109/mwsym.2010.5517075","title":"Magnetically-actuated dielectric cantilever RF MEMS switches","year":2010,"lang":"en","type":"article","venue":"2010 IEEE MTT-S International Microwave Symposium","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Stiction; Cantilever; Microelectromechanical systems; Materials science; Fabrication; Dielectric; Optoelectronics; Radio frequency; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001113849,0.0002096331,0.0002036645,0.0001034846,0.000108055,0.0002347899,0.0003902895,0.0002598523,0.0009177284],"category_scores_gemma":[0.0001707614,0.0001718805,0.0001342523,0.00009888816,0.0001587132,0.0002258539,0.000255702,0.0002572151,0.0003390625],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001226815,"about_ca_system_score_gemma":0.000103635,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001341057,"about_ca_topic_score_gemma":0.0002751689,"domain_scores_codex":[0.9998764,0.000008809334,0.000007263387,0.00002465519,0.00005469879,0.00002815411],"domain_scores_gemma":[0.9999074,0.0000153587,0.0000311997,0.00001108705,0.00001955587,0.00001537862],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000340182,0.000006318726,0.00007971512,0.00002765262,0.000003205297,0.00006182536,0.00001061302,0.00012757,0.9969544,0.0001372667,0.000113461,0.002443956],"study_design_scores_gemma":[0.00003790373,0.0003455717,0.00381654,0.000005932822,0.00001631634,0.0004902481,0.00001537087,0.004239872,0.9839116,0.0001062496,0.00699664,0.00001774421],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9701622,0.002106129,0.02105159,0.0001596281,0.0001909767,0.00003488765,0.0002586373,0.000425765,0.005610271],"genre_scores_gemma":[0.9792893,0.0006503511,0.01600254,0.0000882003,0.0000647806,0.00003087365,0.0001936557,0.00002453423,0.003655709],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009177284,"threshold_uncertainty_score":0.003070116,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006607976551833195,"score_gpt":0.2119423132660617,"score_spread":0.2053343367142285,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}