{"id":"W2039770535","doi":"10.1016/j.mee.2015.01.014","title":"Inductively coupled plasma etching of ultra-shallow Si3N4 nanostructures using SF6/C4F8 chemistry","year":2015,"lang":"en","type":"article","venue":"Microelectronic Engineering","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":false,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Etching (microfabrication); Passivation; Inductively coupled plasma; Surface roughness; Volumetric flow rate; Nanostructure; Fabrication; Materials science; Analytical Chemistry (journal); Plasma; Surface finish; Chamber pressure; Plasma etching; Optoelectronics; Nanotechnology; Chemistry; Composite material; Metallurgy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00009263367,0.000273104,0.0002855816,0.00008762838,0.0000405252,0.00003245071,0.000252703,0.0001476138,0.000008746976],"category_scores_gemma":[0.00009344087,0.0003146238,0.00007257351,0.0002937893,0.00002567951,0.0001024927,0.00002716703,0.0003976093,0.000005813953],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002998267,"about_ca_system_score_gemma":0.0001318224,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003108885,"about_ca_topic_score_gemma":0.00000555575,"domain_scores_codex":[0.9988092,0.000005392214,0.0003113312,0.0002216479,0.000166656,0.000485822],"domain_scores_gemma":[0.9994089,0.00007901069,0.00005516745,0.000242816,0.00006858384,0.0001455011],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000002417911,0.000008950505,0.00002266194,0.00005971633,0.00004751042,0.000002549856,0.0001029521,0.3762541,0.6232188,0.0001220728,0.00003745187,0.0001207184],"study_design_scores_gemma":[0.0003188594,0.00001124008,0.00004450473,0.00004662364,0.00002139027,0.00005631466,0.00003701127,0.3168976,0.6813368,0.00006375118,0.000927079,0.000238838],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9896458,0.0009530141,0.008362366,0.00001786492,0.0001514387,0.0001450768,0.00002712654,0.0002567867,0.0004404665],"genre_scores_gemma":[0.995408,0.00005604729,0.004281753,0.000004279556,0.000111682,0.00001934364,0.00002669121,0.00007888612,0.00001329699],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05935659,"threshold_uncertainty_score":0.9999306,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01114609770490843,"score_gpt":0.2002008112584348,"score_spread":0.1890547135535264,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}