{"id":"W2040216289","doi":"10.1109/jmems.2015.2388532","title":"Extraction Method for the Residual Stress in Multilayer Microplates Under Large Deflection Based on Static Deflection Analysis","year":2015,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Deflection (physics); Residual stress; Materials science; Root mean square; Structural engineering; Biological system; Mathematics; Optics; Mechanics; Composite material; Physics; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002251836,0.0002044902,0.0004548541,0.0005568874,0.00007419741,0.00009963579,0.0002009068,0.0001817907,0.000004403388],"category_scores_gemma":[0.0002296065,0.0001555358,0.0001994042,0.0007711386,0.000008034107,0.0002330203,0.00001049677,0.0005909411,0.000001945728],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009529383,"about_ca_system_score_gemma":0.00006327607,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002290687,"about_ca_topic_score_gemma":0.0008060152,"domain_scores_codex":[0.9980847,0.0003029199,0.0007156391,0.0001772109,0.0003317987,0.0003877652],"domain_scores_gemma":[0.9981927,0.0009328469,0.0003198872,0.0001995946,0.0002543583,0.0001006206],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0002316352,0.00008824116,0.0001238624,0.00003787208,0.0002649644,0.000003996922,0.00007981245,0.699771,0.2980026,0.00009399986,0.0009006935,0.0004013756],"study_design_scores_gemma":[0.001007938,0.0005371352,0.0001432705,0.00009216936,0.0003190897,0.00005719802,0.0002870037,0.8452463,0.1504793,0.0007923319,0.0008535451,0.0001846413],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.08230821,0.0005508221,0.9159781,0.000168336,0.0004901584,0.0003782584,0.00001610426,0.00009705943,0.00001295727],"genre_scores_gemma":[0.9642742,0.00003775042,0.03537083,0.00004291623,0.0001609292,0.00003740603,0.000005630155,0.000047075,0.0000233053],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.8819659,"threshold_uncertainty_score":0.6342565,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02988194043604221,"score_gpt":0.3393320808949383,"score_spread":0.3094501404588961,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}