{"id":"W2040339639","doi":"10.1109/tdmr.2015.2401035","title":"Study of Near-Surface Stresses in Silicon Around Through-Silicon Vias at Elevated Temperatures by Raman Spectroscopy and Simulations","year":2015,"lang":"en","type":"article","venue":"IEEE Transactions on Device and Materials Reliability","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Silicon; Stress (linguistics); Raman spectroscopy; Thermal expansion; Shrinkage; Composite material; Through-silicon via; Spectroscopy; Optoelectronics; Optics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001253823,0.0002293991,0.0002531486,0.0002658077,0.0002139971,0.0003023709,0.000309149,0.0003386794,0.0007326126],"category_scores_gemma":[0.0004382801,0.0001948274,0.0003438327,0.0002016976,0.0004033473,0.000283177,0.0001370614,0.0001804141,0.00009343318],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004136287,"about_ca_system_score_gemma":0.0003923826,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.005268998,"about_ca_topic_score_gemma":0.004118231,"domain_scores_codex":[0.9999408,0.000007640704,0.0000023577,0.000009985468,0.00002278101,0.00001643193],"domain_scores_gemma":[0.9998577,0.00005825924,0.0000284704,0.00001363392,0.00003198786,0.000009965783],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00005193681,0.0000327394,0.002930067,0.0000379888,0.00001823237,0.0001341909,0.00008754242,0.9543664,0.03820101,0.001659973,0.00008569712,0.002394209],"study_design_scores_gemma":[0.000007169687,0.00004370144,0.002174272,0.000003938617,0.000005887042,0.00001754031,0.00002841462,0.9919722,0.005233273,0.0003093246,0.0001980512,0.00000626664],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9906039,0.00006433028,0.00652347,0.0000342363,0.000005560045,0.00001393903,0.00009185092,0.00006871842,0.002593976],"genre_scores_gemma":[0.9980209,0.00004841532,0.001459586,0.000004568014,0.000001839986,0.00001224149,0.00004002385,0.00001055995,0.0004019429],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.005268998,"threshold_uncertainty_score":0.01047665,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01968514828641314,"score_gpt":0.2652793448116388,"score_spread":0.2455941965252256,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}