{"id":"W2040450755","doi":"10.1063/1.3029704","title":"A comparative study of plasma-enhanced chemical vapor gate dielectrics for solution-processed polymer thin-film transistor circuit integration","year":2008,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Xerox (Canada); University of Waterloo","funders":"","keywords":"Plasma-enhanced chemical vapor deposition; Materials science; Thin-film transistor; Optoelectronics; Gate dielectric; Dielectric; Silicon nitride; Chemical vapor deposition; Silicon; Transistor; Gate oxide; Nanotechnology; Layer (electronics); Electrical engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009816488,0.0002504406,0.0006608647,0.0001295025,0.00008289252,0.00001294185,0.0003041592,0.0001131207,0.00000277398],"category_scores_gemma":[0.0000139295,0.0002339007,0.0001635493,0.0004346255,0.00009194216,0.0001980265,0.000007782609,0.0004755319,0.000001490875],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000160549,"about_ca_system_score_gemma":0.00008317607,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003118784,"about_ca_topic_score_gemma":0.000006419099,"domain_scores_codex":[0.9985728,0.000009617531,0.0006611804,0.0001583085,0.0003574455,0.0002406317],"domain_scores_gemma":[0.9990525,0.0001252995,0.0003344619,0.000178564,0.0002525541,0.00005664435],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003961011,0.0005248004,0.000002481937,0.00009220905,0.0002736003,0.000002424424,0.01349609,0.06805444,0.9151441,0.000464243,0.000336336,0.001213124],"study_design_scores_gemma":[0.002033978,0.0003299634,0.00003765605,0.00002854623,0.0001426928,0.00000762904,0.001723988,0.03552837,0.9588495,0.001066498,0.00002763466,0.0002235304],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8613281,0.0001548809,0.1373383,0.000008344021,0.0001647011,0.0004050208,0.00001030481,0.0001219553,0.0004683978],"genre_scores_gemma":[0.9980696,0.00003205546,0.001679381,0.000007942076,0.0001136561,0.00004592761,0.000005339849,0.00003751736,0.000008516265],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1367415,"threshold_uncertainty_score":0.9538195,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03009194564412128,"score_gpt":0.2351821351365441,"score_spread":0.2050901894924228,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}