{"id":"W2040616686","doi":"10.1116/1.1722455","title":"Fabrication of short channel organic thin film transistors by Si-etching method","year":2004,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Organic Electronics and Photovoltaics","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"","keywords":"Thin-film transistor; Materials science; Etching (microfabrication); Fabrication; Optoelectronics; Spin coating; Layer (electronics); Transistor; Channel (broadcasting); Thin film; Nanotechnology; Electrical engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001272278,0.0003164954,0.0003174449,0.0002396185,0.0002262673,0.0002270955,0.000444687,0.0002555161,0.002106793],"category_scores_gemma":[0.0001451558,0.0002590918,0.0002691854,0.0001874471,0.0001551369,0.0002171956,0.0001878322,0.0004407002,0.0007850754],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001811512,"about_ca_system_score_gemma":0.0002830216,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003069431,"about_ca_topic_score_gemma":0.0009584575,"domain_scores_codex":[0.9998944,0.000005260002,0.000009023789,0.00002169839,0.0000514277,0.00001817528],"domain_scores_gemma":[0.9998822,0.00003085538,0.00001796736,0.00001900839,0.00003003654,0.00001983825],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001285247,0.000008755967,0.0000531,0.00008055846,0.000006306656,0.00003650198,0.00001511341,0.00006012206,0.9963101,0.0002849133,0.0001889543,0.002942877],"study_design_scores_gemma":[0.00001652895,0.0001133074,0.001038627,0.000005987918,0.00001319133,0.0001591291,0.000009843414,0.001070303,0.9896792,0.0001458722,0.007741611,0.000006445165],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7909005,0.005031612,0.1776633,0.0004113526,0.0008664896,0.0005885687,0.003681155,0.001718876,0.01913814],"genre_scores_gemma":[0.8006338,0.00469156,0.1792674,0.0001565601,0.0001161277,0.0005207147,0.002179651,0.0001274579,0.01230674],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002106793,"threshold_uncertainty_score":0.007047892,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006090057963607861,"score_gpt":0.2265844618715726,"score_spread":0.2204944039079647,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}