{"id":"W2041688369","doi":"10.1117/12.704605","title":"Development of a model for predicting dry stiction in microelectromechanical systems (MEMS)","year":2007,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Adhesion, Friction, and Surface Interactions","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Stiction; Asperity (geotechnical engineering); Microelectromechanical systems; Materials science; van der Waals force; Work (physics); Adhesion; Mechanics; Contact area; Composite material; Nanotechnology; Mechanical engineering; Engineering; Chemistry; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002458849,0.0003679387,0.0005997124,0.0003066077,0.000373259,0.0004238943,0.0008524066,0.00129769,0.000995459],"category_scores_gemma":[0.0007182464,0.0003827738,0.0006519187,0.0002787287,0.0003005422,0.0007348761,0.0005864844,0.0007177962,0.0003466296],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000428988,"about_ca_system_score_gemma":0.0007445272,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00489347,"about_ca_topic_score_gemma":0.002894539,"domain_scores_codex":[0.9998823,0.00001391732,0.00000753496,0.00002113619,0.00005986431,0.00001522198],"domain_scores_gemma":[0.999864,0.00005717086,0.00001566658,0.00001214428,0.00004205609,0.000008943931],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00001156504,0.00002228818,0.0005026089,0.00004824395,0.00001234225,0.0001288193,0.00004508192,0.9747229,0.00965539,0.00501132,0.0004691179,0.009370269],"study_design_scores_gemma":[0.000001407245,0.000007474833,0.00007712584,0.000001602576,0.000001437891,0.000009272616,0.00000220781,0.9988036,0.0004443874,0.0004079875,0.0002413593,0.000002121476],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.05479216,0.0007170199,0.9381862,0.0002859875,0.000114244,0.0001077989,0.0001647821,0.0002993607,0.005332491],"genre_scores_gemma":[0.873979,0.001621573,0.1106657,0.0001451518,0.0000815661,0.000564912,0.00038947,0.00009782211,0.01245476],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.00489347,"threshold_uncertainty_score":0.009729981,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01477274181072094,"score_gpt":0.2346194557747245,"score_spread":0.2198467139640036,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}