{"id":"W2041763400","doi":"10.1116/1.2194933","title":"Nanoscale channel and small area amorphous silicon vertical thin film transistor","year":2006,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Thin-film transistor; Amorphous silicon; Subthreshold slope; Materials science; Optoelectronics; Channel (broadcasting); Transistor; Oxide thin-film transistor; Silicon; Amorphous solid; Nanoscopic scale; Fabrication; Threshold voltage; Nanotechnology; Electrical engineering; Voltage; Crystalline silicon; Engineering; Layer (electronics); Chemistry; Crystallography","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005448531,0.00008236149,0.00008228848,0.0000756178,0.0001223414,0.0001992325,0.0001953079,0.0001965536,0.001046046],"category_scores_gemma":[0.00009696947,0.00006518879,0.00008753855,0.00007216579,0.0001609661,0.0002369163,0.0001422458,0.0001589941,0.0002312267],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002179432,"about_ca_system_score_gemma":0.0001650529,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003340196,"about_ca_topic_score_gemma":0.0009208925,"domain_scores_codex":[0.9999498,0.000002456637,0.000001652651,0.00001068432,0.00002583652,0.000009518596],"domain_scores_gemma":[0.9999653,0.00001350248,0.000005926719,0.000003760973,0.000007079128,0.000004388439],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004242859,0.00001660634,0.0003907552,0.000122639,0.000007342852,0.0001796352,0.00002641873,0.001691831,0.9630874,0.01261085,0.001048094,0.02077588],"study_design_scores_gemma":[0.00003993951,0.000361845,0.002464529,0.00002403226,0.00002624756,0.0008415563,0.00003675213,0.02795479,0.9072979,0.004726082,0.05620383,0.00002247883],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7904675,0.01716961,0.1314796,0.0008431792,0.0007892046,0.0001067061,0.0008220779,0.0008641927,0.05745792],"genre_scores_gemma":[0.9598169,0.002730295,0.02888591,0.0001078209,0.00008834289,0.00004135248,0.0002037839,0.00002365381,0.008101861],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001046046,"threshold_uncertainty_score":0.003499329,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008438645110736612,"score_gpt":0.1886957123992818,"score_spread":0.1802570672885452,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}