{"id":"W2042004883","doi":"10.1063/1.2060927","title":"A kinetic model for the oxidation of silicon germanium alloys","year":2005,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":43,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Germanium; Silicon; Oxidizing agent; Oxide; Materials science; Germanium oxide; Alloy; Diffusion; Silicon oxide; Inorganic chemistry; Analytical Chemistry (journal); Metallurgy; Chemistry; Thermodynamics; Environmental chemistry; Physics; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004880392,0.001388912,0.001503141,0.001035661,0.0009466615,0.001713982,0.003174989,0.003152281,0.007425096],"category_scores_gemma":[0.001177496,0.001000601,0.001877048,0.0006473698,0.001049718,0.002885944,0.0008606546,0.001351608,0.001962926],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001556881,"about_ca_system_score_gemma":0.001428215,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00770543,"about_ca_topic_score_gemma":0.002992322,"domain_scores_codex":[0.9997119,0.00004428222,0.00002039208,0.00007231787,0.00008720015,0.00006387108],"domain_scores_gemma":[0.9996744,0.0001186811,0.00003931369,0.0000342298,0.00009651124,0.00003678136],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0000501572,0.0000504723,0.0003378249,0.0001411709,0.00003161839,0.0002594755,0.00008476075,0.8830383,0.006883027,0.1042375,0.001205538,0.003680158],"study_design_scores_gemma":[0.00002883638,0.0000170096,0.00007191973,0.000008554532,0.00001112987,0.00006480184,0.000008305145,0.9778146,0.0005561642,0.01908699,0.002313893,0.00001784496],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.07699751,0.003509772,0.8507589,0.002646995,0.0005476134,0.000304694,0.001620569,0.0008935641,0.0627204],"genre_scores_gemma":[0.8020338,0.004147284,0.08356729,0.0005223446,0.0002354877,0.001560381,0.001530247,0.0003742049,0.1060288],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.00770543,"threshold_uncertainty_score":0.02483946,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01854992393430977,"score_gpt":0.2294172900265844,"score_spread":0.2108673660922746,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}