{"id":"W2042079275","doi":"10.1063/1.4807905","title":"Fast atom beam-activated n-Si/n-GaAs wafer bonding with high interfacial transparency and electrical conductivity","year":2013,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":39,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Materials science; Argon; Annealing (glass); Wafer; Atom (system on chip); Wafer bonding; Electrical resistivity and conductivity; Helium; Atomic physics; Optoelectronics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001368661,0.000502236,0.0002145862,0.0001790077,0.0002098761,0.000316817,0.0002934657,0.0002566306,0.001602407],"category_scores_gemma":[0.0001766188,0.0002691261,0.0001702139,0.0001954755,0.000213579,0.0002351988,0.00039507,0.0002541794,0.0003469799],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001995917,"about_ca_system_score_gemma":0.0002336027,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003810699,"about_ca_topic_score_gemma":0.001422064,"domain_scores_codex":[0.9998738,0.0000118968,0.00000593749,0.00002723552,0.00005637031,0.00002476133],"domain_scores_gemma":[0.9998916,0.00002480971,0.0000290861,0.00002280742,0.00002168433,0.00001000809],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001569164,0.000006181917,0.0001623713,0.00003520065,0.000005345888,0.0000309875,0.0000176986,0.0001190594,0.9980937,0.0001438024,0.00004082167,0.001329121],"study_design_scores_gemma":[0.000004449844,0.00006746528,0.002082575,0.000003340167,0.000005431776,0.00009325565,0.00002218877,0.0008481676,0.9958116,0.00007492903,0.0009817729,0.000004887911],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.990892,0.0004261397,0.005058169,0.00002277849,0.00001717587,0.00002553587,0.0001510088,0.00006758816,0.003339706],"genre_scores_gemma":[0.9902479,0.00032998,0.007514791,0.000009049832,0.000004480914,0.00002669428,0.0001179406,0.00003798526,0.001711126],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001602407,"threshold_uncertainty_score":0.005360603,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009779548144638854,"score_gpt":0.1916496859880321,"score_spread":0.1818701378433932,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}