{"id":"W2042249506","doi":"10.1063/1.1927275","title":"General model and segregation coefficient measurement for ultrashallow doping by excimer laser annealing","year":2005,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Dopant; Excimer laser; Materials science; Doping; Annealing (glass); Laser; Diffusion; Analytical Chemistry (journal); Thermodynamics; Chemistry; Optics; Optoelectronics; Metallurgy; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001168283,0.0001595125,0.000125601,0.00001987759,0.00007588025,0.00007161434,0.00007796819,0.00004086475,0.0000010096],"category_scores_gemma":[0.000001536673,0.0001695382,0.00002402812,0.00004764707,0.0000239135,0.0001130161,0.000014294,0.00006309433,0.000001950791],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001001704,"about_ca_system_score_gemma":0.000006063267,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002923094,"about_ca_topic_score_gemma":7.048075e-7,"domain_scores_codex":[0.9992668,0.000003960834,0.0001486846,0.0001902874,0.000170526,0.0002197383],"domain_scores_gemma":[0.999774,0.000009416129,0.00003263867,0.0001180634,0.00002640176,0.00003947377],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004593208,0.000007557518,0.000001962551,0.00006005332,0.00001151,3.676409e-8,0.0001053101,0.3515711,0.6402016,0.0003021614,0.005136283,0.002597777],"study_design_scores_gemma":[0.0002329707,0.000003306894,0.000002544956,0.00001560706,0.0000156214,1.781661e-7,0.000002904726,0.4050513,0.5936154,0.0004042583,0.0004778645,0.0001781186],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5111661,0.00002908307,0.4878347,0.0001814994,0.00003551387,0.0002484616,0.00001755572,0.0003296154,0.000157481],"genre_scores_gemma":[0.9710209,0.000004802968,0.02757286,0.0009762338,0.0001890487,0.0001323807,0.00004885926,0.0000507495,0.000004113541],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4602618,"threshold_uncertainty_score":0.6913568,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01671135250610997,"score_gpt":0.2126243180202964,"score_spread":0.1959129655141865,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}