{"id":"W2042394787","doi":"10.1117/12.809975","title":"Optical characterization of the mask writing process in bimetallic grayscale photomasks","year":2009,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Photomask; Materials science; Grayscale; Optics; Laser; Laser power scaling; Optoelectronics; Raster graphics; Thin film; Raster scan; Computer science; Pixel; Resist; Nanotechnology; Layer (electronics); Artificial intelligence; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004062186,0.0003011172,0.0004572605,0.000109007,0.0000456466,0.00009030741,0.0008402611,0.0001776613,0.00001333252],"category_scores_gemma":[0.0002247177,0.0002299345,0.000387787,0.0004788232,0.0001383415,0.0005509142,0.00007318744,0.0002704549,7.223337e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001064403,"about_ca_system_score_gemma":0.00002588099,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000343409,"about_ca_topic_score_gemma":1.8493e-7,"domain_scores_codex":[0.997922,2.387259e-8,0.0008739964,0.0002798957,0.0005536636,0.0003704117],"domain_scores_gemma":[0.998895,0.00007322239,0.0002812909,0.0000689116,0.0006064747,0.00007507503],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003234948,0.00008112296,0.0007640673,0.0006561147,0.0001112848,6.605526e-8,0.0002866671,0.0002791433,0.939792,0.05779496,0.00005978752,0.0001424658],"study_design_scores_gemma":[0.0006973114,0.0001211833,0.01282295,0.0006227648,0.00008937955,0.0000128559,0.0007000021,0.02269196,0.9606455,0.001088555,0.0001986133,0.0003089359],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9972593,0.00007583356,0.000008422378,0.0005350598,0.0002820947,0.0005131268,0.00004750813,0.00009926467,0.001179412],"genre_scores_gemma":[0.9935812,0.00008027943,0.005898345,0.00006139865,0.0002338191,0.00006599109,0.000009585986,0.00004779658,0.00002158467],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05670641,"threshold_uncertainty_score":0.9376458,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009768766414975661,"score_gpt":0.2202549914036738,"score_spread":0.2104862249886981,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}