{"id":"W2043062012","doi":"10.1116/1.1405515","title":"Estimates of differential sputtering yields for deposition applications","year":2001,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":78,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Sputtering; Deposition (geology); Anisotropy; Scaling; Ion; Differential (mechanical device); Atomic physics; Computational physics; Sputter deposition; Scaling law; Materials science; Energy (signal processing); Physics; Thin film; Geometry; Optics; Geology; Nanotechnology; Thermodynamics; Mathematics; Quantum mechanics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002019639,0.0001217109,0.000272651,0.0006735395,0.0002057486,0.00005411613,0.0002866322,0.0001100565,0.00002703666],"category_scores_gemma":[0.00001889114,0.0001013314,0.00009256071,0.0008774858,0.0002345792,0.0003539592,0.00004514904,0.0001880525,0.000001159577],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002786311,"about_ca_system_score_gemma":0.00002559939,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000005177807,"about_ca_topic_score_gemma":0.000003835484,"domain_scores_codex":[0.999065,0.000003640069,0.0004128886,0.0001373748,0.0001539933,0.0002271103],"domain_scores_gemma":[0.9993339,0.0000576471,0.0001906585,0.0001434609,0.0002162241,0.0000581075],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001671749,0.00006124959,0.006449979,0.000042548,0.000074433,0.000003553424,0.00007859652,0.005768386,0.9788368,0.0004904317,0.00006269155,0.008114601],"study_design_scores_gemma":[0.0008201043,0.0005934444,0.007019506,0.0002564145,0.0003123933,0.0007413527,0.001458419,0.4031961,0.5786832,0.004869622,0.001601196,0.0004482844],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8089492,0.0005229381,0.1898643,0.0003155627,0.0001566543,0.00008804401,0.000007057575,0.00004549838,0.00005073351],"genre_scores_gemma":[0.9817966,0.0005879379,0.01754465,0.000005517325,0.00002619256,0.00001170877,9.685231e-7,0.000009737747,0.00001674827],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4001536,"threshold_uncertainty_score":0.4132175,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00701178697638731,"score_gpt":0.2459443921709769,"score_spread":0.2389326051945896,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}