{"id":"W2043360400","doi":"10.1117/12.417438","title":"Microfluidics in environmental monitoring: a proposed mechanism for anisotropic wet chemical etching of c-Si","year":2001,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Isotropic etching; Etching (microfabrication); Microfluidics; Materials science; Mechanism (biology); Fluidics; Anisotropy; Nanotechnology; Microsystem; Inlet; Optoelectronics; Reactive-ion etching; Chemical process; Chemical engineering; Optics; Mechanical engineering; Electrical engineering; Engineering; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006725576,0.0007367971,0.0003700959,0.000549837,0.000826014,0.001217271,0.001688349,0.001839303,0.001962988],"category_scores_gemma":[0.0004596889,0.0004982026,0.0004640478,0.0002350896,0.001065432,0.001336052,0.0006200824,0.001032486,0.0009360388],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000553465,"about_ca_system_score_gemma":0.000563233,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003363719,"about_ca_topic_score_gemma":0.0003933457,"domain_scores_codex":[0.9996465,0.00004347816,0.00001680221,0.00008835008,0.0001476184,0.00005721275],"domain_scores_gemma":[0.9997979,0.00006951686,0.00003488218,0.00002201273,0.00004887219,0.00002686875],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001374109,0.0001550737,0.0006929972,0.000736371,0.0000332566,0.001235869,0.0002753321,0.002653197,0.7327162,0.2227855,0.003455743,0.03512294],"study_design_scores_gemma":[0.0001813408,0.0008334617,0.001109907,0.0001050063,0.00007379088,0.002844851,0.0001025234,0.05623692,0.8418558,0.03074869,0.06577086,0.0001369268],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1796377,0.04181329,0.6640882,0.01977578,0.007706467,0.001269229,0.0005731902,0.002912473,0.0822237],"genre_scores_gemma":[0.7605739,0.02021628,0.1913425,0.001871815,0.001242635,0.0005731186,0.0001213972,0.00006023529,0.0239981],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001962988,"threshold_uncertainty_score":0.006566882,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0098369401589168,"score_gpt":0.2176895869184782,"score_spread":0.2078526467595614,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}