{"id":"W2043374446","doi":"10.1364/ao.39.000157","title":"High-rate automated deposition system for the manufacture of complex multilayer coatings","year":2000,"lang":"en","type":"article","venue":"Applied Optics","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":43,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences","funders":"","keywords":"Sputter deposition; Deposition (geology); Materials science; Substrate (aquarium); Cavity magnetron; Thin film; Optics; Optical coating; Sputtering; Physical vapor deposition; Optoelectronics; Coating; Nanotechnology; Physics; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003573796,0.0001610338,0.0002505303,0.00001751364,0.0002760424,0.0000973241,0.0002411327,0.00009632551,0.0001626119],"category_scores_gemma":[0.00002460328,0.0001069975,0.00005530285,0.00009476274,0.0001096016,0.00005189535,0.00003409561,0.00008100625,0.00009614215],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000270821,"about_ca_system_score_gemma":0.0000149562,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00006413194,"about_ca_topic_score_gemma":0.000006564412,"domain_scores_codex":[0.9988809,0.00002280529,0.0004017515,0.0002308824,0.0001935399,0.0002700927],"domain_scores_gemma":[0.999005,0.0003949948,0.0001938865,0.0002545796,0.00009937019,0.0000521881],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008459049,0.00003441277,0.000003088976,0.0001446961,0.000008939327,6.982565e-7,0.0002453121,0.005340997,0.9709492,0.02109666,0.0005706717,0.001520707],"study_design_scores_gemma":[0.0007861454,0.0001025912,0.0005747564,0.00004683848,0.00008907238,0.000005027855,0.0003555939,0.1062268,0.8908621,0.0003095474,0.0004313406,0.0002101596],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9907678,0.000009669546,0.005613482,0.0002024132,0.0001196058,0.0007454835,0.00008934738,0.0003528646,0.002099316],"genre_scores_gemma":[0.9293409,0.000002107927,0.07012556,0.000215845,0.00007697382,0.00007922319,0.00002951631,0.00002247947,0.0001073999],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1008858,"threshold_uncertainty_score":0.436323,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01432960800104053,"score_gpt":0.2414992230587796,"score_spread":0.2271696150577391,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}