{"id":"W2043608674","doi":"10.1117/12.470627","title":"High-resolution F 2 -laser machining of micro-optic components","year":2002,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Optics; Materials science; Laser; Fluence; Fabrication; Grating; Optoelectronics; Lens (geology); Femtosecond; Optical fiber; Microlens; Photonics; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0004287392,0.0003809592,0.000536671,0.0001549621,0.00007181682,0.00009711947,0.0009528375,0.0002394393,0.00003585935],"category_scores_gemma":[0.0002213403,0.0003459086,0.0004395655,0.0003142473,0.0002260911,0.0006009073,0.000166168,0.0003209905,0.000003680492],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001836144,"about_ca_system_score_gemma":0.000008494671,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000166412,"about_ca_topic_score_gemma":8.015202e-8,"domain_scores_codex":[0.9977291,2.060554e-8,0.0008952685,0.0003232235,0.000614871,0.0004374952],"domain_scores_gemma":[0.9985142,0.00008814991,0.0003439805,0.00008196454,0.0008635661,0.0001080915],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004532584,0.0001133777,0.0001366563,0.001217904,0.0003403386,1.429256e-7,0.0001948229,0.001205972,0.9294569,0.06274354,0.004328098,0.0002169185],"study_design_scores_gemma":[0.0009754724,0.0002118546,0.000462446,0.0006675426,0.0001636985,0.00001808152,0.0001810883,0.1642028,0.8302047,0.001468197,0.0009871684,0.0004569264],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9966784,0.0001700317,0.0001141793,0.0004508847,0.0003938585,0.0004036652,0.00007736496,0.0003680003,0.001343674],"genre_scores_gemma":[0.836526,0.0001042583,0.1628378,0.00002810852,0.0002453115,0.00007809227,0.00001233029,0.00009320886,0.0000748991],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1629968,"threshold_uncertainty_score":0.9998993,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01354022822235948,"score_gpt":0.2129434809665746,"score_spread":0.1994032527442151,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}