{"id":"W2043608674","doi":"10.1117/12.470627","title":"High-resolution F 2 -laser machining of micro-optic components","year":2002,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Optics; Materials science; Laser; Fluence; Fabrication; Grating; Optoelectronics; Lens (geology); Femtosecond; Optical fiber; Microlens; Photonics; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001404754,0.0003765447,0.0002072822,0.0003520392,0.0003435783,0.0003910535,0.000378727,0.000438483,0.002093424],"category_scores_gemma":[0.0003491539,0.0002639858,0.0001484784,0.0002603949,0.0003391055,0.0003961182,0.0003029775,0.0003972962,0.0007386689],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008097559,"about_ca_system_score_gemma":0.0006479322,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002422705,"about_ca_topic_score_gemma":0.007803116,"domain_scores_codex":[0.9997935,0.000009796615,0.000007080275,0.0000376106,0.000119672,0.00003245104],"domain_scores_gemma":[0.9998386,0.00004562218,0.00003107307,0.00002847401,0.00004509995,0.00001106629],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002711252,0.000008462319,0.0003927617,0.00008265576,0.000003214361,0.0001130863,0.00007427553,0.001259745,0.9742241,0.001365456,0.00134021,0.02110905],"study_design_scores_gemma":[0.000016981,0.0001589522,0.00418141,0.00001321444,0.000004316177,0.0005991556,0.00004381967,0.01135651,0.9606075,0.0004739801,0.02252621,0.00001794253],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6299449,0.003254949,0.3237069,0.0005006479,0.000262122,0.0002496663,0.0006274718,0.00244147,0.03901187],"genre_scores_gemma":[0.7128937,0.000722488,0.2698556,0.00009677208,0.00004716641,0.00009999911,0.0003226915,0.0001648126,0.01579686],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002422705,"threshold_uncertainty_score":0.007003248,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01354022822235948,"score_gpt":0.2129434809665746,"score_spread":0.1994032527442151,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}