{"id":"W2043643979","doi":"10.1117/12.879453","title":"Surface morphology of SiO2 coated InP/InGaAs/InGaAsP microstructures following irradiation with the ArF and KrF excimer lasers","year":2011,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Materials science; Irradiation; Fluence; Excimer laser; Excimer; Laser; Surface roughness; Optoelectronics; Layer (electronics); Blueshift; Scanning electron microscope; Surface finish; Analytical Chemistry (journal); Optics; Photoluminescence; Nanotechnology; Composite material; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005034012,0.0003448061,0.0004350086,0.00008425421,0.00009000183,0.00008180435,0.0007062897,0.0002191582,0.000009627332],"category_scores_gemma":[0.0001696317,0.000244217,0.0002481605,0.0002922303,0.0003426483,0.0004878466,0.0001308582,0.0003039464,4.482857e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008589241,"about_ca_system_score_gemma":0.00002278834,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004141299,"about_ca_topic_score_gemma":5.060891e-7,"domain_scores_codex":[0.9983826,4.90565e-8,0.0005495269,0.0003025694,0.0004106017,0.0003547088],"domain_scores_gemma":[0.9988008,0.0001075452,0.0003071401,0.00007552652,0.0006284956,0.00008054528],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001099631,0.00003684427,0.0008963408,0.0005469312,0.0004727293,2.463952e-7,0.0009194444,0.0003390542,0.9718331,0.02340732,0.001363807,0.00007426724],"study_design_scores_gemma":[0.0008658733,0.0003076694,0.003340912,0.0003435508,0.0002461014,0.0000266288,0.001057332,0.0116703,0.9801641,0.001249133,0.0003264749,0.0004019022],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9978217,0.0001676649,0.00007494853,0.0003431289,0.0001967968,0.0004431759,0.00003541977,0.0002210791,0.0006960242],"genre_scores_gemma":[0.9408062,0.00005803302,0.05884374,0.00004921855,0.00008533723,0.00004666278,0.00000679658,0.00007987354,0.00002413035],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05876879,"threshold_uncertainty_score":0.9958882,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0105042017681584,"score_gpt":0.2086826551856381,"score_spread":0.1981784534174796,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}