{"id":"W2043706659","doi":"10.1007/s00339-003-2377-0","title":"Femtosecond laser micromachining of grooves in indium phosphide","year":2004,"lang":"en","type":"article","venue":"Applied Physics A","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":99,"is_retracted":false,"has_abstract":false,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Surface micromachining; Materials science; Optics; Groove (engineering); Laser; Fluence; Femtosecond; Perpendicular; Wavelength; Laser ablation; Polarization (electrochemistry); Optoelectronics; Geometry; Chemistry; Physics; Fabrication","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008861884,0.0001475709,0.0002259625,0.0001710309,0.0003115622,0.0002849539,0.0002864567,0.0002074423,0.0008128925],"category_scores_gemma":[0.0002628809,0.0002763623,0.0001019587,0.0001646914,0.0002760713,0.0002631613,0.0002275641,0.0003153801,0.0001513531],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003761017,"about_ca_system_score_gemma":0.0004255908,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002146601,"about_ca_topic_score_gemma":0.00531431,"domain_scores_codex":[0.9999337,0.000003110045,0.000004494706,0.00001890755,0.0000243723,0.00001543794],"domain_scores_gemma":[0.9998817,0.00002555244,0.00002780312,0.00002408965,0.00002711178,0.00001373443],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006919746,0.00001221048,0.0003830098,0.00004348799,0.000003527154,0.00007886389,0.0000995093,0.0004830041,0.9933913,0.0004061509,0.0001033904,0.004926376],"study_design_scores_gemma":[0.00002820461,0.0002343083,0.00886154,0.000009185262,0.000008476074,0.0002931556,0.0001282509,0.005357948,0.9828206,0.0003131823,0.001935315,0.000009823383],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9924149,0.0005336113,0.004588326,0.00006479461,0.00005340137,0.00001555707,0.00004893856,0.0001718299,0.002108655],"genre_scores_gemma":[0.9935696,0.0001933791,0.004463156,0.00001662532,0.000006826166,0.00001048646,0.00003515822,0.00002368629,0.001680896],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002146601,"threshold_uncertainty_score":0.004268229,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005264064577461949,"score_gpt":0.1894222515043015,"score_spread":0.1841581869268396,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}