{"id":"W2043862383","doi":"10.1116/1.4900730","title":"Determination of spot size and acid diffusion length in positive chemically amplified resist for e-beam lithography at 100 and 5 kV","year":2014,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal; Institut National de la Recherche Scientifique","funders":"","keywords":"Resist; Electron-beam lithography; Lithography; Materials science; Diffusion; Cathode ray; Optics; Grating; Analytical Chemistry (journal); Chemistry; Electron; Nanotechnology; Optoelectronics; Physics; Chromatography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00159294,0.0002239497,0.0004676137,0.001126496,0.0002276096,0.00004526396,0.0002437982,0.0002845398,8.898429e-7],"category_scores_gemma":[0.0001727254,0.0002020669,0.00002218857,0.0006137448,0.00112421,0.0002525161,0.0001369539,0.0002378616,2.097691e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001232275,"about_ca_system_score_gemma":0.00005436373,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001033491,"about_ca_topic_score_gemma":0.000005396407,"domain_scores_codex":[0.9985121,0.00002115524,0.0005543441,0.0003155705,0.0001886013,0.0004082356],"domain_scores_gemma":[0.9991338,0.0000449615,0.0003773317,0.0001386376,0.0002568089,0.0000484501],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001438957,0.00003748574,0.0006367133,0.0001949883,0.00001380071,6.450962e-7,0.0001142449,2.823497e-7,0.9516238,0.0008361249,9.977167e-7,0.04639704],"study_design_scores_gemma":[0.0009030594,0.0006551526,0.001119595,0.0002783561,0.00004630933,0.0001017293,0.00006404385,0.00007914118,0.9731839,0.02320496,0.0001761705,0.0001875329],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9804441,0.006986253,0.01190182,0.0002050692,0.00005429554,0.000309036,0.000005410302,0.00007971727,0.00001435109],"genre_scores_gemma":[0.9809347,0.002853721,0.01613668,0.00001719095,0.00001253295,0.00002593069,6.609301e-7,0.00001710788,0.000001442306],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0462095,"threshold_uncertainty_score":0.8240048,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006710452056378759,"score_gpt":0.2244753990515529,"score_spread":0.2177649469951742,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}