{"id":"W2044586127","doi":"10.1116/1.2167974","title":"Formation of nanoscale columnar structures in silicon by a maskless reactive ion etching process","year":2006,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":36,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Reactive-ion etching; Wafer; Materials science; Nanoscopic scale; Silicon; Controllability; Plasma etching; Etching (microfabrication); Optoelectronics; Nanotechnology; Plasma; Voltage; Deep reactive-ion etching; Dry etching; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004119251,0.0001257516,0.0002808773,0.0005666129,0.0001182551,0.0000365602,0.0003228986,0.0001467938,0.000004520677],"category_scores_gemma":[0.00002115654,0.0001057276,0.00003562065,0.001108781,0.0002762949,0.0006020952,0.00003323172,0.0002629491,4.083867e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004977515,"about_ca_system_score_gemma":0.00004663242,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002499385,"about_ca_topic_score_gemma":0.00002269844,"domain_scores_codex":[0.998886,0.00001127634,0.000490153,0.0001440206,0.0002322401,0.0002362626],"domain_scores_gemma":[0.9993834,0.00003891936,0.0002847452,0.0001249631,0.0001289007,0.00003902811],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009281924,0.00004536463,0.00481241,0.00004483848,0.000004833214,0.000001739054,0.0002529474,0.00188068,0.9906517,0.000739957,0.0001102928,0.001445942],"study_design_scores_gemma":[0.0003363639,0.0001009313,0.009397494,0.0001234439,0.00001439544,0.00007553564,0.001519154,0.01244072,0.9683341,0.007295033,0.0002083044,0.0001545229],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9972381,0.001190667,0.0008342246,0.0003367739,0.00007284696,0.0001339836,0.00001021403,0.0000375762,0.0001456296],"genre_scores_gemma":[0.9987463,0.000155099,0.001058835,0.000004449184,0.0000101135,0.000007122038,7.876013e-7,0.000008879791,0.000008394713],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02231761,"threshold_uncertainty_score":0.4311446,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003707304321884397,"score_gpt":0.2168277239726338,"score_spread":0.2131204196507494,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}