{"id":"W2044827804","doi":"10.1116/1.3700439","title":"Electron-beam lithography for photonic waveguide fabrication: Measurement of the effect of field stitching errors on optical performance and evaluation of a new compensation method","year":2012,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences; National Research Council Canada","funders":"","keywords":"Image stitching; Optics; Electron-beam lithography; Photomask; Lithography; Compensation (psychology); Photolithography; Waveguide; Materials science; Fabrication; Photonics; Next-generation lithography; Beam (structure); Optoelectronics; Physics; Resist; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.006079171,0.0001571869,0.0004086456,0.0004116178,0.0001430016,0.00001554067,0.0002566,0.0001744502,0.000001228493],"category_scores_gemma":[0.0002827738,0.0001091331,0.00003636641,0.0005370957,0.0003494679,0.0001947454,0.00004910907,0.000223973,3.19317e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001262425,"about_ca_system_score_gemma":0.0002734626,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001615801,"about_ca_topic_score_gemma":0.00000174063,"domain_scores_codex":[0.9984596,0.0000472059,0.0005297063,0.0001539257,0.000486616,0.0003229605],"domain_scores_gemma":[0.9987851,0.00005419332,0.0004540749,0.0001481459,0.0005159756,0.00004245182],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001089182,0.00003011134,0.0005307182,0.0002501033,0.00005235018,1.601004e-8,0.0001181369,0.00006316162,0.9412851,0.001023262,0.000001781884,0.05653638],"study_design_scores_gemma":[0.0007999705,0.001376707,0.001294761,0.0002977141,0.0002643813,0.00002391701,0.0000461851,0.001977106,0.9923147,0.001464891,0.00004496771,0.00009469127],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9832881,0.01015584,0.005749697,0.0002419755,0.0001278571,0.000390239,9.599563e-7,0.00001842266,0.00002689548],"genre_scores_gemma":[0.9972065,0.0004121207,0.002330874,0.000008435059,0.00001822823,0.00001481075,1.834667e-7,0.00000838016,4.307629e-7],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05644169,"threshold_uncertainty_score":0.4450319,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0188327560967894,"score_gpt":0.270741300458333,"score_spread":0.2519085443615436,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}