{"id":"W2045447816","doi":"10.1116/1.4885500","title":"Etching mechanism of the single-step through-silicon-via dry etch using SF6/C4F8 chemistry","year":2014,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":32,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Canadian Bee Research Fund; Micron Technology","keywords":"Etching (microfabrication); Plasma; Plasma etching; Silicon; Discontinuity (linguistics); Sputtering; Reactive-ion etching; Ion; Smoothness; Dry etching; Chemistry; Materials science; Analytical Chemistry (journal); Nanotechnology; Optoelectronics; Thin film; Physics","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001260789,0.0003415258,0.000239389,0.0002549592,0.0001920013,0.0002110949,0.0003940715,0.000400651,0.0008112523],"category_scores_gemma":[0.0001054243,0.0002102422,0.0003278436,0.00009693831,0.0001814885,0.0003251077,0.0001774285,0.0002729055,0.0002917954],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002232081,"about_ca_system_score_gemma":0.0002435828,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005930071,"about_ca_topic_score_gemma":0.0005730063,"domain_scores_codex":[0.9998751,0.000004784018,0.000005331066,0.00002647091,0.00006497058,0.00002330767],"domain_scores_gemma":[0.9999484,0.000007609377,0.00001540926,0.000008419745,0.00001530481,0.000004967484],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001941386,0.000007124917,0.000290606,0.00007875625,0.000007416539,0.00009797935,0.00003180278,0.0002406012,0.9926563,0.0004710945,0.0000950492,0.006003729],"study_design_scores_gemma":[0.000007361401,0.00007665841,0.001297484,0.000003413602,0.000008439115,0.0002977164,0.00001827784,0.003024031,0.9930182,0.0000933233,0.002147366,0.000007833793],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9338049,0.001443016,0.05978813,0.0001129201,0.000118984,0.0001456997,0.0002628676,0.0004520467,0.003871451],"genre_scores_gemma":[0.9639935,0.0006362041,0.03251069,0.00002904855,0.00001340221,0.00004404523,0.0001324997,0.00002805212,0.002612552],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008112523,"threshold_uncertainty_score":0.002713919,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01196032110788183,"score_gpt":0.221489695272388,"score_spread":0.2095293741645061,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}