{"id":"W2045929382","doi":"10.1117/12.754325","title":"MEMS tunable silicon Fabry-Perot cavity","year":2007,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Fabry–Pérot interferometer; Materials science; Actuator; Microelectromechanical systems; Optics; Silicon; Optoelectronics; Full width at half maximum; Bandwidth (computing); Optical filter; Dielectric; Finesse; Modulation (music); Computer science; Telecommunications; Physics; Acoustics; Wavelength","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0009697854,0.0004127961,0.0005125825,0.0001164546,0.0000910602,0.000114326,0.001015233,0.0003042937,0.00003278421],"category_scores_gemma":[0.0003578547,0.0003553831,0.0006422725,0.000410589,0.0002307847,0.0006216094,0.0001484358,0.0004955982,0.000006901135],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002534716,"about_ca_system_score_gemma":0.00002383821,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002382522,"about_ca_topic_score_gemma":8.243417e-7,"domain_scores_codex":[0.9973471,6.455663e-9,0.0008239971,0.0003855076,0.0007405311,0.0007028813],"domain_scores_gemma":[0.9983316,0.000191978,0.0001881458,0.00008169904,0.0009675513,0.0002389898],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006300352,0.0001064254,0.0004183585,0.0008018267,0.000471198,2.543933e-7,0.0002112825,0.0004305948,0.6014557,0.3922262,0.002315389,0.001499778],"study_design_scores_gemma":[0.001930447,0.0004044353,0.003555903,0.000532633,0.000308306,0.00004099659,0.002062364,0.2341742,0.7318327,0.003229039,0.02077996,0.001148948],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9751208,0.0001996376,0.0002476436,0.0004710791,0.0004436595,0.0005010274,0.000040424,0.000270352,0.02270537],"genre_scores_gemma":[0.9728848,0.0001409403,0.02596472,0.0001030781,0.0004536733,0.00008592227,0.000008128212,0.00009349903,0.0002652793],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3889972,"threshold_uncertainty_score":0.9998898,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01012649305578737,"score_gpt":0.2242992337883873,"score_spread":0.2141727407325999,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}