{"id":"W2045990729","doi":"10.1117/12.735091","title":"Graded silicon based PECVD thin film for photovoltaic applications","year":2007,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Plasma-enhanced chemical vapor deposition; Refractive index; Thin film; X-ray photoelectron spectroscopy; Ellipsometry; Silicon; Transmittance; Silicon oxynitride; Fourier transform infrared spectroscopy; Amorphous silicon; Silicon oxide; Silane; Analytical Chemistry (journal); Optoelectronics; Optics; Crystalline silicon; Chemistry; Silicon nitride; Nanotechnology; Composite material; Chemical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000756044,0.0004276702,0.0004780022,0.0002173069,0.0001138971,0.0000868449,0.001229128,0.000369831,0.000009696185],"category_scores_gemma":[0.0004033486,0.0003999417,0.0007855063,0.0004990008,0.0002704181,0.0003938492,0.00007156788,0.0004421156,0.000002119113],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002998043,"about_ca_system_score_gemma":0.00002829952,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006512063,"about_ca_topic_score_gemma":8.033902e-7,"domain_scores_codex":[0.9975556,7.569879e-9,0.0008379736,0.0004266077,0.0005787651,0.0006010091],"domain_scores_gemma":[0.9980991,0.0003227787,0.0002354649,0.0001120348,0.001098811,0.0001317989],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000683086,0.00009571965,0.0001274776,0.001016624,0.0002955326,6.131103e-8,0.0001286059,0.002037224,0.7869923,0.2048886,0.004015784,0.0003338498],"study_design_scores_gemma":[0.001409774,0.0002201813,0.0006189451,0.0002058992,0.0001896355,0.00000782149,0.001153559,0.1582756,0.8187292,0.00297858,0.01564155,0.000569239],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9921275,0.0002351369,0.002940571,0.0006632223,0.0002807728,0.001485721,0.0001279692,0.0008115638,0.001327524],"genre_scores_gemma":[0.7731307,0.00006675474,0.2250625,0.0001018655,0.000352229,0.0009832641,0.0000276497,0.0001560227,0.0001190855],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2221219,"threshold_uncertainty_score":0.9998453,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01140665342665498,"score_gpt":0.2225746511173588,"score_spread":0.2111679976907038,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}