{"id":"W2045990729","doi":"10.1117/12.735091","title":"Graded silicon based PECVD thin film for photovoltaic applications","year":2007,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Plasma-enhanced chemical vapor deposition; Refractive index; Thin film; X-ray photoelectron spectroscopy; Ellipsometry; Silicon; Transmittance; Silicon oxynitride; Fourier transform infrared spectroscopy; Amorphous silicon; Silicon oxide; Silane; Analytical Chemistry (journal); Optoelectronics; Optics; Crystalline silicon; Chemistry; Silicon nitride; Nanotechnology; Composite material; Chemical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005837787,0.0002791143,0.000208032,0.0001477077,0.0001172203,0.000273397,0.0006601545,0.0002799714,0.001653017],"category_scores_gemma":[0.0001409816,0.0001757952,0.0001363098,0.0002248505,0.00007720491,0.0002073198,0.0001578224,0.0003329225,0.0007580547],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000196604,"about_ca_system_score_gemma":0.0001250007,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004024154,"about_ca_topic_score_gemma":0.001255994,"domain_scores_codex":[0.99993,0.000002508681,0.000003711418,0.00001446698,0.00004052878,0.000008715892],"domain_scores_gemma":[0.9999493,0.000007485342,0.000008521789,0.0000099152,0.00002009085,0.000004639632],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007142065,0.00000680126,0.00008507461,0.0000411726,0.0000025712,0.00004199526,0.00000402149,0.00008485364,0.9971552,0.00009829039,0.00008000706,0.002392808],"study_design_scores_gemma":[0.000004620805,0.00006251904,0.001020061,0.000006761657,0.00001069764,0.0001937861,0.00001050106,0.001412196,0.9940186,0.00008506021,0.003171998,0.000003224061],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9225417,0.004175375,0.04879782,0.0001797747,0.0002684643,0.0001954436,0.001078764,0.0008206354,0.02194212],"genre_scores_gemma":[0.9299151,0.002218612,0.05565987,0.0001257568,0.00002174026,0.00007794458,0.0008779821,0.00007823846,0.01102477],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001653017,"threshold_uncertainty_score":0.005529881,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01140665342665498,"score_gpt":0.2225746511173588,"score_spread":0.2111679976907038,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}