{"id":"W2047022984","doi":"10.1142/s0219581x12400157","title":"THROUGH SILICON VIAS INTEGRABLE WITH THIN-FILM PIEZOELECTRIC STRUCTURES","year":2012,"lang":"en","type":"article","venue":"International Journal of Nanoscience","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Wafer; Piezoelectricity; Optoelectronics; Microfabrication; Silicon on insulator; Ground plane; Silicon; Layer (electronics); Capacitance; Electronic engineering; Nanotechnology; Electrical engineering; Composite material; Fabrication; Electrode","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001370887,0.0003973167,0.0002140446,0.0003778788,0.000196367,0.0006013196,0.0004142993,0.0003849277,0.0009367522],"category_scores_gemma":[0.0004173269,0.0002270297,0.0003074504,0.000235471,0.00033984,0.0004623318,0.0004140182,0.0001899495,0.0003490301],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003599874,"about_ca_system_score_gemma":0.0003161097,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003779969,"about_ca_topic_score_gemma":0.0008181144,"domain_scores_codex":[0.9998349,0.00001404924,0.00001179788,0.00003774768,0.00007377826,0.00002765437],"domain_scores_gemma":[0.9997112,0.00004785293,0.0001221892,0.00004801352,0.00004543255,0.00002536008],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003576515,0.00003201486,0.00127923,0.0001571094,0.00002984184,0.0003514171,0.0001230875,0.001904176,0.9796893,0.004492491,0.0004428974,0.01146262],"study_design_scores_gemma":[0.00004844209,0.0009641548,0.005523936,0.0000503068,0.00008182446,0.001615124,0.0001710319,0.01914418,0.9253854,0.002242824,0.04472921,0.00004354575],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.93012,0.001687979,0.05717321,0.0001394243,0.0002806183,0.0001565297,0.0002941062,0.0007532128,0.009394898],"genre_scores_gemma":[0.9656298,0.0008988726,0.03018931,0.00001748465,0.00003575195,0.00007227928,0.000129135,0.00003806803,0.002989211],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009367522,"threshold_uncertainty_score":0.003133714,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01151447223010849,"score_gpt":0.2389035511121158,"score_spread":0.2273890788820073,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}