{"id":"W2047360618","doi":"10.1117/12.761339","title":"3D MOEMS-based optical micro-bench platform for the miniaturization of sensing devices","year":2008,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Electrowetting and Microfluidic Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National d'Optique","funders":"","keywords":"Miniaturization; Microfabrication; Lithography; Fabrication; Computer science; Wafer; Materials science; Digital Light Processing; Nanotechnology; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004354397,0.0003200173,0.0004093689,0.0001215097,0.0001406613,0.00005068109,0.000759288,0.0002749504,0.000002680565],"category_scores_gemma":[0.0005639498,0.0002441774,0.0004965564,0.0003515743,0.0003365111,0.0002814751,0.00008081289,0.0003315369,4.976544e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001307948,"about_ca_system_score_gemma":0.0000413255,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006024003,"about_ca_topic_score_gemma":2.037349e-7,"domain_scores_codex":[0.9981495,1.09156e-8,0.000688253,0.0002797278,0.0004393105,0.000443238],"domain_scores_gemma":[0.9981545,0.0003623794,0.0002509803,0.00007969314,0.001093282,0.00005919926],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005138029,0.00004883055,0.0001303542,0.0006214377,0.0003788191,8.287716e-8,0.0002023359,0.000777903,0.9397949,0.05345286,0.003299617,0.001241484],"study_design_scores_gemma":[0.0007644331,0.0002087319,0.0003800793,0.0002392681,0.0001556712,0.00002420849,0.0005973945,0.07150968,0.9224852,0.000307132,0.003047392,0.0002808312],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9953524,0.0006847077,0.001289514,0.001068028,0.0002348493,0.0006021066,0.00004211782,0.0002600802,0.0004662287],"genre_scores_gemma":[0.7798975,0.000287599,0.219303,0.00006785252,0.000231169,0.00007619159,0.00001248556,0.00007677721,0.00004738112],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2180135,"threshold_uncertainty_score":0.9957265,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01164974873888016,"score_gpt":0.2137195413762913,"score_spread":0.2020697926374111,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}