{"id":"W2048386869","doi":"10.1002/cvde.200504223","title":"Synthesis of Al2O3–SiO2 Films by Ar/O2 Plasma-Enhanced CVD from Alkoxide Precursors","year":2006,"lang":"en","type":"article","venue":"Chemical Vapor Deposition","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Saskatchewan","funders":"","keywords":"Alkoxide; Amorphous solid; Plasma; Materials science; Chemical engineering; Composite number; Oxygen; Thin film; Chemistry; Nanotechnology; Composite material; Organic chemistry; Catalysis","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00003423693,0.0001896296,0.0002843024,0.00003141534,0.00002134719,0.00003133947,0.0001316192,0.0001787057,0.0002345001],"category_scores_gemma":[0.00001931805,0.0001878671,0.00008035498,0.00008350814,0.0000367145,0.0001395482,0.0000197744,0.00008173894,0.0000380691],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004121162,"about_ca_system_score_gemma":0.000005133286,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002483824,"about_ca_topic_score_gemma":0.000004660006,"domain_scores_codex":[0.9990183,0.00001436835,0.0003666244,0.0002256206,0.0001636819,0.0002114609],"domain_scores_gemma":[0.9995239,0.0001163949,0.00008145579,0.0001871826,0.00002880561,0.00006221988],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002328003,0.00004133087,0.00002955843,0.00007333321,0.00002794965,0.000001738773,0.00002887456,0.0001686676,0.9942982,0.00001041826,0.004990601,0.0003060973],"study_design_scores_gemma":[0.0002059145,0.000009597914,0.0001592674,0.0001212165,0.00003824105,0.00000289143,0.00002702243,0.00133313,0.99741,0.0003590905,0.0001190825,0.0002145347],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9961297,0.0004274046,0.0004480654,0.00001340249,0.0002322802,0.0001032981,0.0002168776,0.0002213787,0.002207623],"genre_scores_gemma":[0.9965332,0.00002748452,0.00281179,0.00001753305,0.0001466424,0.00004096525,0.0003680426,0.00003803778,0.00001634692],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004871518,"threshold_uncertainty_score":0.7660999,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004146528238623863,"score_gpt":0.1743669584913376,"score_spread":0.1702204302527137,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}