{"id":"W2048653883","doi":"10.1117/12.829743","title":"Enhanced laser-writing techniques for bimetallic grayscale photomasks","year":2009,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Grayscale; Photomask; Computer science; Laser; Bimetallic strip; Materials science; Artificial intelligence; Optics; Pixel; Nanotechnology; Metallurgy; Resist","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001103452,0.0002182685,0.0001329226,0.0002708123,0.0001640792,0.0002771378,0.0004310113,0.0002236873,0.002220403],"category_scores_gemma":[0.0002715629,0.0002180536,0.0001134768,0.0001888969,0.0001847241,0.000296634,0.0003850528,0.0004009685,0.000597443],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002986282,"about_ca_system_score_gemma":0.0001665063,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003890766,"about_ca_topic_score_gemma":0.00105851,"domain_scores_codex":[0.9998298,0.00001132461,0.00001016706,0.00004164239,0.00008589013,0.00002113032],"domain_scores_gemma":[0.9998406,0.00003038472,0.00005139939,0.00003329702,0.00003057048,0.0000138438],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008559728,0.00001039693,0.00006740246,0.00004424233,0.000002040044,0.00003024679,0.00002740843,0.00009103111,0.995313,0.000232535,0.00008738404,0.004085621],"study_design_scores_gemma":[0.000002624549,0.00004630347,0.0009064237,0.000003011724,0.000002791056,0.0001400492,0.0000106305,0.001395671,0.99496,0.00005196634,0.002474529,0.000005943468],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9134061,0.001746372,0.07428768,0.0001561924,0.0001552041,0.0001128521,0.0002854694,0.0009506078,0.008899609],"genre_scores_gemma":[0.9015725,0.0006427692,0.0886173,0.00007512028,0.00002118359,0.00007492381,0.0001504281,0.00007483234,0.008770984],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002220403,"threshold_uncertainty_score":0.007427931,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008975453720047762,"score_gpt":0.2446873697099967,"score_spread":0.235711915989949,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}