{"id":"W2049244803","doi":"10.1016/j.optlaseng.2011.11.020","title":"Maskless pattern transfer using 355nm laser","year":2011,"lang":"en","type":"article","venue":"Optics and Lasers in Engineering","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Maskless lithography; Laser; Photoresist; Laser ablation; Lithography; Photolithography; Electroplating; Ablation; Optoelectronics; Deposition (geology); Substrate (aquarium); Laser power scaling; Ultraviolet; Optics; Nanotechnology; Resist; Electron-beam lithography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001026365,0.0002766264,0.0003963469,0.0002535303,0.0004278584,0.0004195243,0.000734118,0.0004388018,0.002820217],"category_scores_gemma":[0.0002239141,0.0003677112,0.0002670293,0.0002579708,0.0002780013,0.0005075108,0.0005770436,0.0004323068,0.001077326],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003639064,"about_ca_system_score_gemma":0.0003345349,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004800332,"about_ca_topic_score_gemma":0.0009706231,"domain_scores_codex":[0.9997266,0.000007758596,0.00001085869,0.00006784185,0.0001532799,0.00003365388],"domain_scores_gemma":[0.999845,0.00002408326,0.0000330412,0.00005537683,0.00003071264,0.00001172734],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004113976,0.00002574559,0.0001617563,0.00006160198,0.000005739354,0.00008475744,0.00005448231,0.0003273206,0.9899309,0.0005551607,0.0003774036,0.008373939],"study_design_scores_gemma":[0.000009316386,0.0000850725,0.001087973,0.000003587008,0.000005927291,0.0002642055,0.0000188654,0.003145837,0.9922792,0.0001539958,0.002936533,0.000009518018],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9131086,0.0008480104,0.06438007,0.0002761738,0.0003710829,0.0001313345,0.0003572602,0.001930471,0.01859713],"genre_scores_gemma":[0.9559866,0.0002295966,0.03032329,0.00005680531,0.00002357198,0.00004224408,0.0001870356,0.0001281669,0.01302268],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002820217,"threshold_uncertainty_score":0.009434581,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01719552079072386,"score_gpt":0.188532403739133,"score_spread":0.1713368829484091,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}