{"id":"W2049244803","doi":"10.1016/j.optlaseng.2011.11.020","title":"Maskless pattern transfer using 355nm laser","year":2011,"lang":"en","type":"article","venue":"Optics and Lasers in Engineering","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Maskless lithography; Laser; Photoresist; Laser ablation; Lithography; Photolithography; Electroplating; Ablation; Optoelectronics; Deposition (geology); Substrate (aquarium); Laser power scaling; Ultraviolet; Optics; Nanotechnology; Resist; Electron-beam lithography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008742102,0.0001697041,0.0001604157,0.0001192124,0.00001874002,0.00003743232,0.00009719798,0.00009296308,0.00002327909],"category_scores_gemma":[0.000004622249,0.0001813802,0.00002129388,0.0001092395,0.00001789787,0.0001481552,0.00002384834,0.00013807,0.000001774601],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000272455,"about_ca_system_score_gemma":0.000004843174,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003829874,"about_ca_topic_score_gemma":0.00001389781,"domain_scores_codex":[0.9993601,0.000004401027,0.0001788333,0.0001372639,0.00006705742,0.0002523614],"domain_scores_gemma":[0.9997796,0.0000101347,0.00000621459,0.0001294483,0.00001090214,0.00006364921],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00006045253,0.0002118054,0.015804,0.005187628,0.0002375908,0.0006239576,0.008207495,0.6963223,0.2510567,0.002459217,0.0001168069,0.01971207],"study_design_scores_gemma":[0.0003560307,0.00002628646,0.001309367,0.000307778,0.00002222406,0.00001791287,0.00005475004,0.8198221,0.1772431,0.0001710832,0.0001727573,0.000496581],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9040877,0.00007772842,0.09440118,0.000003072308,0.0002408387,0.00007725489,0.000008392886,0.0003761621,0.0007276429],"genre_scores_gemma":[0.9874671,0.00008372725,0.0123181,0.00001336977,0.00003923619,0.000009603499,0.000002599113,0.00006064453,0.000005670943],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1234998,"threshold_uncertainty_score":0.7396472,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01719552079072386,"score_gpt":0.188532403739133,"score_spread":0.1713368829484091,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}