{"id":"W2049678342","doi":"10.1149/1.2982906","title":"Hybrid Bonding (Plasma activation and Anodic bonding) for Vacuum Sealing","year":2008,"lang":"en","type":"article","venue":"ECS Transactions","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Optech (Canada)","funders":"","keywords":"Anodic bonding; Plasma; Microelectromechanical systems; Anode; Materials science; Wire bonding; Composite material; Nanotechnology; Chemistry; Layer (electronics); Electrical engineering; Electrode; Physical chemistry; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004077855,0.0005020009,0.0004375901,0.0004287607,0.0003874329,0.000490812,0.0007386358,0.0008959839,0.002965834],"category_scores_gemma":[0.0002949577,0.0004297934,0.0004091306,0.0003908728,0.0003816019,0.0008215197,0.00073561,0.0005507355,0.001094086],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001770609,"about_ca_system_score_gemma":0.0001595347,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001554541,"about_ca_topic_score_gemma":0.0002518681,"domain_scores_codex":[0.9996737,0.00005791325,0.00001488815,0.00006908587,0.0001471649,0.00003720592],"domain_scores_gemma":[0.9998035,0.00007101989,0.00003076046,0.00003998269,0.00004315667,0.0000116125],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008758717,0.00006545446,0.0003355869,0.0006751918,0.00006391633,0.0001894653,0.0001240527,0.00116907,0.9130281,0.009569654,0.001728023,0.07296389],"study_design_scores_gemma":[0.00003630448,0.001120271,0.0020896,0.00003780898,0.00009621469,0.001506984,0.00005915676,0.01598961,0.911178,0.003032961,0.06478947,0.00006355916],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.389585,0.03568299,0.5391154,0.0006790957,0.001551503,0.0003747974,0.0002100385,0.001845903,0.03095523],"genre_scores_gemma":[0.7814606,0.008866055,0.1913623,0.0002900016,0.0003583414,0.0003584446,0.0001453542,0.0001373262,0.01702157],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.002965834,"threshold_uncertainty_score":0.00992173,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01937764987418609,"score_gpt":0.2127817062783875,"score_spread":0.1934040564042014,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}