{"id":"W2050140399","doi":"10.1143/jjap.51.06fc05","title":"Study of Development Processes for ZEP-520 as a High-Resolution Positive and Negative Tone Electron Beam Lithography Resist","year":2012,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":30,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"","keywords":"Resist; Materials science; Electron-beam lithography; Methyl isobutyl ketone; Grating; Lithography; Dissolution; Scanning electron microscope; Cathode ray; Nanotechnology; Optoelectronics; Electron; Chemistry; Composite material; Ketone; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001837525,0.0002183103,0.0001823301,0.0001208695,0.0001178737,0.0002326363,0.0002277089,0.0001881604,0.0003205873],"category_scores_gemma":[0.0004022626,0.0001874209,0.0001548025,0.0001412449,0.0001865439,0.0003852305,0.0001425907,0.0003042595,0.000126589],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003152995,"about_ca_system_score_gemma":0.0001828653,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008569121,"about_ca_topic_score_gemma":0.0008971448,"domain_scores_codex":[0.9998136,0.00001861885,0.000007299679,0.00005208993,0.00008594601,0.00002248408],"domain_scores_gemma":[0.9998336,0.00006047484,0.00004725708,0.00001476137,0.00003173513,0.00001222586],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002684002,0.0000107216,0.0003045394,0.00004456927,0.000002668585,0.00003304175,0.00003073475,0.0002690877,0.9976816,0.0001541098,0.00001488708,0.001427141],"study_design_scores_gemma":[0.000006186856,0.0001273711,0.001888177,0.000002557836,0.000006388431,0.00007721416,0.00001713952,0.004159798,0.9930829,0.00002770227,0.0006000395,0.000004486728],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9911781,0.0008406889,0.006741446,0.00003294005,0.000006213665,0.00002375757,0.0000591214,0.00002094742,0.001096788],"genre_scores_gemma":[0.9905326,0.0007748944,0.007568654,0.00001101725,0.000003630491,0.00002058764,0.00006242105,0.00001291834,0.001013309],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008569121,"threshold_uncertainty_score":0.002287626,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009002557507120302,"score_gpt":0.2662587828649617,"score_spread":0.2572562253578414,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}