{"id":"W2050190582","doi":"","title":"Analysis of dynamic effects of charge injection due to ESD in MEMS","year":2010,"lang":"en","type":"article","venue":"Electrical Overstress/Electrostatic Discharge Symposium","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"","keywords":"Capacitive sensing; Microelectromechanical systems; Air gap (plumbing); Charge (physics); Transfer function; Space charge; Dielectric; Materials science; Electrostatic discharge; Capacitance; Electronic engineering; Electrical engineering; Optoelectronics; Physics; Engineering; Voltage; Electrode; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001252707,0.0002950414,0.0007901632,0.001289671,0.0000337649,0.00001376651,0.0002780028,0.0002065612,0.00003611832],"category_scores_gemma":[0.0002259433,0.0002840099,0.0001930962,0.00377994,0.0000596994,0.0001695619,0.00004278638,0.0005690062,0.000007262066],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001341636,"about_ca_system_score_gemma":0.00003260607,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008133434,"about_ca_topic_score_gemma":0.0004013286,"domain_scores_codex":[0.9981342,0.0000159072,0.0005535773,0.0003537607,0.0003131132,0.0006294208],"domain_scores_gemma":[0.999006,0.0002837539,0.000128401,0.0004126904,0.00005579685,0.0001133375],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004793303,0.0001618737,0.0009775652,0.0001381479,0.0002544106,0.000009797627,0.0002327162,0.001482315,0.9916259,0.001312026,0.00007525173,0.003682045],"study_design_scores_gemma":[0.000603835,0.0006125017,0.01308265,0.00004893424,0.0002931936,0.000004818923,0.00002184106,0.02375784,0.960647,0.0004492178,0.0001140043,0.0003640969],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9933303,0.0002114557,0.004906556,0.00008281008,0.0002764723,0.0004707987,0.00003513092,0.0002127021,0.0004737486],"genre_scores_gemma":[0.998962,0.0001774184,0.0005849183,0.0000200744,0.00001653149,0.00008165272,0.00003247504,0.00004351311,0.00008136841],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03097885,"threshold_uncertainty_score":0.9999612,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.001928449896737988,"score_gpt":0.2167001376686494,"score_spread":0.2147716877719114,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}