{"id":"W2050625694","doi":"10.1116/1.2186656","title":"Fabrication of out-of-plane micromirrors in silicon-on-insulator planar waveguides","year":2006,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences","funders":"","keywords":"Coupling loss; Materials science; Finite-difference time-domain method; Optics; Waveguide; Fabrication; Silicon on insulator; Planar; Beam propagation method; Optoelectronics; Return loss; Silicon; Optical fiber; Refractive index; Physics; Computer science; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004600611,0.0003943073,0.0003392342,0.0001575567,0.0002098177,0.0004356821,0.000684839,0.000352404,0.0003077472],"category_scores_gemma":[0.0005767195,0.0005511243,0.0003139329,0.0001479135,0.0002580438,0.0003843846,0.0003254852,0.0005921235,0.0002748425],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004807653,"about_ca_system_score_gemma":0.0004293126,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001033272,"about_ca_topic_score_gemma":0.00180319,"domain_scores_codex":[0.9996896,0.00002867957,0.00002767578,0.0000787107,0.0001281973,0.00004714958],"domain_scores_gemma":[0.9996761,0.0000799502,0.0001005608,0.00006980167,0.00005001057,0.00002350821],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003080664,0.00001857253,0.0002036405,0.00007521813,0.000005043815,0.00007020186,0.0000395418,0.001319546,0.9949458,0.0004495863,0.0000770364,0.002764849],"study_design_scores_gemma":[0.00001870809,0.0001757509,0.0008961973,0.000007145148,0.000006287485,0.0001179586,0.00002467724,0.008608514,0.987875,0.00008552084,0.002173787,0.00001044143],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8936718,0.001153362,0.09949179,0.0001441949,0.000183617,0.0002052545,0.0004511036,0.000811243,0.003887512],"genre_scores_gemma":[0.7410247,0.0009652278,0.2553753,0.00003686726,0.00002018137,0.0001097551,0.0002288135,0.00008291977,0.002156215],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001033272,"threshold_uncertainty_score":0.003488243,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008203941422055695,"score_gpt":0.2281566554003307,"score_spread":0.219952713978275,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}