{"id":"W2050756245","doi":"10.1117/12.525802","title":"Wafer-level vacuum packaging technology based on selective electroplating","year":2004,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National d'Optique","funders":"","keywords":"Electroplating; Wafer; Vacuum packing; Wafer-level packaging; Materials science; Manufacturing engineering; Die preparation; Process engineering; Optoelectronics; Engineering; Mechanical engineering; Nanotechnology; Wafer dicing","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002847133,0.0004164148,0.0004505582,0.0003186305,0.0001080449,0.00007393698,0.0009331487,0.0003635991,0.000005113788],"category_scores_gemma":[0.0004724326,0.0003645667,0.0004461021,0.0007915603,0.0002167448,0.0003429781,0.0001110156,0.0006882942,0.000003192069],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004435634,"about_ca_system_score_gemma":0.0000428801,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000004433705,"about_ca_topic_score_gemma":2.099686e-7,"domain_scores_codex":[0.9978771,6.767829e-9,0.0005824455,0.000394343,0.0005445431,0.0006016026],"domain_scores_gemma":[0.9986811,0.0001038522,0.0001971945,0.00008354997,0.000855301,0.00007900961],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004256595,0.00008530792,0.0004069265,0.0003166873,0.000346116,2.584014e-7,0.00008832971,0.006513689,0.536131,0.4544446,0.0007495485,0.0008749867],"study_design_scores_gemma":[0.001639817,0.0005553695,0.00059724,0.0005525156,0.0001158559,0.00002167193,0.001378588,0.09410405,0.886853,0.01287585,0.0007136274,0.0005924256],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9920036,0.0000942455,0.0008329978,0.00241372,0.000189158,0.0004580938,0.00003225813,0.0007719795,0.00320393],"genre_scores_gemma":[0.8767666,0.00004687817,0.1226874,0.00006509417,0.0001544885,0.0001560598,0.000004915602,0.00008766235,0.00003089974],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4415687,"threshold_uncertainty_score":0.9998806,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009981845563260386,"score_gpt":0.2134091147548415,"score_spread":0.2034272691915811,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}