{"id":"W2051341421","doi":"10.1049/mnl.2010.0233","title":"Ultra-thin porous silicon membranes fabricated using dry etching","year":2011,"lang":"en","type":"article","venue":"Micro & Nano Letters","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds Québécois de la Recherche sur la Nature et les Technologies","keywords":"Materials science; Membrane; Wafer; Porous silicon; Silicon; Xenon difluoride; Etching (microfabrication); Porosity; Scanning electron microscope; Dry etching; Thin film; Fabrication; Nanotechnology; Composite material; Optoelectronics; Chemistry; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000360562,0.0004914297,0.0003696575,0.0003649201,0.0002470693,0.0003999054,0.0006718116,0.0007200214,0.0008728469],"category_scores_gemma":[0.0004733444,0.0005374308,0.0004823191,0.0002464933,0.0003828375,0.0006541627,0.000567127,0.001128355,0.000522971],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004118379,"about_ca_system_score_gemma":0.000339946,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003219275,"about_ca_topic_score_gemma":0.0005934451,"domain_scores_codex":[0.9997465,0.00001447042,0.00002255879,0.00004948707,0.0001268576,0.00004025288],"domain_scores_gemma":[0.9996934,0.00009229168,0.00008324391,0.00004437525,0.00006299228,0.00002367596],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001041473,0.000004915753,0.00003532885,0.0001030459,0.00001130469,0.00005318916,0.00002184916,0.00008589213,0.9966505,0.0003374249,0.0001016427,0.002584456],"study_design_scores_gemma":[0.000005831173,0.00002969662,0.0003216045,0.0000056934,0.000007988852,0.0002018052,0.00000945513,0.0004628781,0.9956356,0.0001038756,0.00320776,0.000007921928],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7288038,0.007554424,0.2506736,0.0005865339,0.0004432666,0.0002315051,0.001220098,0.001408864,0.009077945],"genre_scores_gemma":[0.822497,0.005310768,0.1639025,0.0002443331,0.00006517259,0.0002626942,0.001323662,0.0001267474,0.006267098],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008728469,"threshold_uncertainty_score":0.0029881,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0230496976409336,"score_gpt":0.2259297777016258,"score_spread":0.2028800800606922,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}