{"id":"W2051379056","doi":"10.1016/s0968-4328(01)00038-5","title":"Preparation of metallized GaN/sapphire cross sections for TEM analysis using wedge polishing","year":2002,"lang":"en","type":"article","venue":"Micron","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds National de la Recherche Luxembourg","keywords":"Sapphire; Materials science; Polishing; Chemical-mechanical planarization; Ion milling machine; Composite material; Semiconductor; Wedge (geometry); Transmission electron microscopy; Optoelectronics; Optics; Nanotechnology; Layer (electronics); Laser","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003390455,0.0005302444,0.0003886985,0.0005224113,0.0004961338,0.0002858933,0.0005395405,0.0003732067,0.00604372],"category_scores_gemma":[0.0003678114,0.0005331155,0.0002911232,0.0003038157,0.0002553366,0.0003332273,0.0002558003,0.001056476,0.001576895],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000209063,"about_ca_system_score_gemma":0.0003353099,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009806915,"about_ca_topic_score_gemma":0.002696084,"domain_scores_codex":[0.9999059,0.000006152,0.000006994791,0.00002607062,0.00003134919,0.00002344179],"domain_scores_gemma":[0.9995667,0.0001046195,0.00004651893,0.00009552149,0.0001480297,0.00003867936],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000365584,0.00002103091,0.00009985902,0.00006388997,0.000007943719,0.00006440967,0.00003540983,0.0001467189,0.9970641,0.0002423731,0.000184122,0.002033609],"study_design_scores_gemma":[0.00003211752,0.0002199253,0.006173578,0.0000194533,0.00003255365,0.0003063648,0.00006035178,0.002620463,0.9827521,0.000300285,0.0074702,0.00001261452],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6924168,0.001918375,0.2764383,0.0003028599,0.000412239,0.001506337,0.005256944,0.002334002,0.01941413],"genre_scores_gemma":[0.6138439,0.002200373,0.3586193,0.0003711443,0.00008527637,0.001071514,0.00738077,0.001111418,0.01531631],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00604372,"threshold_uncertainty_score":0.02021831,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0346629120030707,"score_gpt":0.3320776661293501,"score_spread":0.2974147541262794,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}