{"id":"W2051566239","doi":"10.1115/1.4006618","title":"Modeling of Contact and Stiction in Electrostatic Microcantilever Actuators","year":2012,"lang":"en","type":"article","venue":"Journal of Nanotechnology in Engineering and Medicine","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Ontario Centres of Excellence; Brown University","keywords":"Stiction; Bistability; Actuator; Microelectromechanical systems; Materials science; Cantilever; Substrate (aquarium); Mechanics; Electrostatics; Contact force; Adhesive; Nanotechnology; Optoelectronics; Classical mechanics; Physics; Composite material; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002235056,0.0004506958,0.0005075645,0.0003151276,0.0003662385,0.0005106727,0.001102648,0.001614978,0.001196059],"category_scores_gemma":[0.0006691094,0.0003931963,0.0004640531,0.0002177897,0.0006455252,0.0007372799,0.0004213983,0.0005505059,0.0002604679],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006834887,"about_ca_system_score_gemma":0.0006583664,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004610802,"about_ca_topic_score_gemma":0.002195569,"domain_scores_codex":[0.9998083,0.00003155916,0.000008570324,0.00003609845,0.00007862843,0.00003683058],"domain_scores_gemma":[0.9997862,0.00009518886,0.00003663277,0.00002573483,0.00003560189,0.00002060904],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00002043116,0.00002331817,0.0003244391,0.00002613372,0.00001318075,0.0002029154,0.00007050353,0.972552,0.01992462,0.004031773,0.0001702541,0.002640384],"study_design_scores_gemma":[0.000002560387,0.000009139852,0.00009964508,0.000001153071,0.000001577183,0.00001749243,0.000003099413,0.9984647,0.0008955873,0.0002868685,0.0002152863,0.000002917536],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3281718,0.000798272,0.6482703,0.000569004,0.0000968762,0.0001521709,0.0002978496,0.0006196205,0.02102422],"genre_scores_gemma":[0.9744383,0.0003691243,0.01774979,0.00008313647,0.0000209582,0.000176758,0.0001044737,0.00006699815,0.006990502],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004610802,"threshold_uncertainty_score":0.00916791,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005982088933273004,"score_gpt":0.2288356828464672,"score_spread":0.2228535939131942,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}