{"id":"W2052043895","doi":"10.1063/1.1488245","title":"Discrete-path transport theory of physical sputtering","year":2002,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":29,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Sputtering; Boltzmann equation; Mean free path; Physics; Kinetic energy; Collision; Formalism (music); Boundary value problem; Projectile; Mechanics; Classical mechanics; Computational physics; Scattering; Thermodynamics; Computer science; Thin film; Quantum mechanics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000364746,0.0004520874,0.0005843533,0.0006162602,0.0003633193,0.000937108,0.001060036,0.0008788343,0.003134253],"category_scores_gemma":[0.0009030896,0.0002559208,0.0005290093,0.0004251802,0.001117085,0.001516317,0.0006116781,0.0009171842,0.0004673813],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001393603,"about_ca_system_score_gemma":0.0007882704,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002937167,"about_ca_topic_score_gemma":0.001072716,"domain_scores_codex":[0.9998348,0.00002585731,0.000005565149,0.00002373434,0.0000847128,0.0000253018],"domain_scores_gemma":[0.9997932,0.00008366165,0.0000190905,0.00002443527,0.00005875507,0.00002086821],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00002848678,0.00002268028,0.0001990249,0.00008993258,0.00001052814,0.0001474564,0.0001030193,0.2305302,0.005471391,0.7577152,0.0009533318,0.004728799],"study_design_scores_gemma":[0.00001111605,0.00001057054,0.00008692138,0.00000414027,0.000002565139,0.00004290402,0.00001045866,0.91352,0.0004872777,0.08451047,0.00130582,0.000007885038],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.06509487,0.002232168,0.8928018,0.001304105,0.0003361272,0.00009659289,0.0002525322,0.0003835787,0.03749813],"genre_scores_gemma":[0.8631219,0.003778709,0.09796521,0.00042098,0.0001860792,0.0002620186,0.0002967415,0.000156047,0.03381227],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.003134253,"threshold_uncertainty_score":0.01048511,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008280121813447257,"score_gpt":0.2032835508412253,"score_spread":0.1950034290277781,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}