{"id":"W2052275329","doi":"10.1002/pssc.200881453","title":"Amorphisation and sub‐100‐nm exfoliation of hydrogen‐ion‐implanted silicon","year":2009,"lang":"en","type":"article","venue":"Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Exfoliation joint; Amorphous solid; Materials science; Silicon; Transmission electron microscopy; Raman spectroscopy; Annealing (glass); Ion; Raman scattering; Ion implantation; Analytical Chemistry (journal); Crystallography; Nanotechnology; Chemistry; Composite material; Graphene; Optics; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009053808,0.0001290429,0.0001134725,0.0001117085,0.000122879,0.0002220845,0.0001509393,0.0001172173,0.0006108761],"category_scores_gemma":[0.0001560925,0.0001371382,0.000117451,0.0000693278,0.0002200243,0.000182907,0.0001783079,0.0002020194,0.000153536],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000181127,"about_ca_system_score_gemma":0.00008316777,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002462343,"about_ca_topic_score_gemma":0.0004378189,"domain_scores_codex":[0.9999373,0.000005453469,0.000003717294,0.00001215023,0.00002480793,0.00001664487],"domain_scores_gemma":[0.9998842,0.00004491024,0.00002766022,0.00001762892,0.00001050839,0.00001509265],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004931519,0.000005966936,0.00022136,0.00002569216,0.000004491426,0.00007468902,0.00003789115,0.000193765,0.9981601,0.00008671915,0.00002237549,0.001117617],"study_design_scores_gemma":[0.000003620569,0.00005517291,0.001742922,0.000001686878,0.000003133384,0.00005830105,0.00002095628,0.0005885178,0.9968445,0.00003391252,0.0006449837,0.000002357743],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9973131,0.0003728405,0.001021456,0.00001671449,0.00001154778,0.000005482036,0.00008437826,0.0000408472,0.001133688],"genre_scores_gemma":[0.9986904,0.0001355406,0.0005002531,0.000008881937,0.000002299355,0.000002753696,0.0000618176,0.000008720934,0.0005894031],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006108761,"threshold_uncertainty_score":0.002043605,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04094580001750481,"score_gpt":0.3163243479028915,"score_spread":0.2753785478853867,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}