{"id":"W2052722425","doi":"10.1116/1.4821550","title":"Thin film Ni-Si solid-state reactions: Phase formation sequence on amorphized Si","year":2013,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Semiconductor materials and interfaces","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal; Université de Montréal; Regroupement Québécois sur les Matériaux de Pointe","funders":"Natural Sciences and Engineering Research Council of Canada; U.S. Department of Energy","keywords":"Rutherford backscattering spectrometry; Materials science; Pole figure; Transmission electron microscopy; Misorientation; Substrate (aquarium); Phase (matter); Analytical Chemistry (journal); Crystallography; Metastability; Texture (cosmology); Diffraction; Thin film; Ion implantation; Ion; Microstructure; Chemistry; Optics; Nanotechnology; Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001443816,0.0002997828,0.0005052652,0.0008883514,0.0005890513,0.0003496556,0.0004987552,0.0001748553,0.00009988195],"category_scores_gemma":[0.00006687868,0.0002352007,0.00003447032,0.0005648745,0.000869071,0.001193435,0.000121724,0.0004249914,0.000009796448],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001712307,"about_ca_system_score_gemma":0.0003364028,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001957092,"about_ca_topic_score_gemma":0.000001395544,"domain_scores_codex":[0.9978411,0.00004999199,0.0008114393,0.0003747003,0.0003103029,0.0006124586],"domain_scores_gemma":[0.9980741,0.00001579238,0.0009868334,0.0002229746,0.0006179913,0.00008233007],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007038873,0.0001391429,0.00004180101,0.0000402428,0.00003418928,0.000001170641,0.0001845498,0.000004110759,0.9773096,0.002484315,0.00005011484,0.01964034],"study_design_scores_gemma":[0.001209776,0.0009361742,0.00001640376,0.0002214008,0.00004017727,0.00008691139,0.0004746526,0.0001529121,0.9507282,0.04510558,0.0007927795,0.0002350067],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.995159,0.001325369,0.001140311,0.001555218,0.0003602532,0.0003136311,0.00001010895,0.00007852175,0.00005756723],"genre_scores_gemma":[0.9988171,0.0003277474,0.0006096511,0.00008495648,0.00007053,0.00003516036,0.000002396756,0.00001754601,0.00003485163],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04262127,"threshold_uncertainty_score":0.9591208,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02310871260535738,"score_gpt":0.273406908071582,"score_spread":0.2502981954662246,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}