{"id":"W2053026278","doi":"10.1117/12.876234","title":"Bimetallic grayscale photomasks written using optical density feedback control","year":2011,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Grayscale; Laser; Computer science; Photomask; Pixel; Optics; Raster graphics; Laser power scaling; Brightness; Materials science; Artificial intelligence; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005878881,0.000509938,0.0006731478,0.0001475272,0.0001032604,0.000155744,0.001191588,0.0003581526,0.00003315903],"category_scores_gemma":[0.0003118762,0.0004478357,0.0006543751,0.0003684238,0.0003630685,0.0007814452,0.0001906223,0.0004214941,0.000004170385],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002627469,"about_ca_system_score_gemma":0.00004005785,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002604487,"about_ca_topic_score_gemma":3.406512e-7,"domain_scores_codex":[0.9973446,2.575888e-8,0.00090198,0.0004545221,0.0006690599,0.0006298773],"domain_scores_gemma":[0.998066,0.0001001734,0.0002732299,0.0001070103,0.001248054,0.00020553],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001262182,0.0001283718,0.0004101201,0.0008744692,0.0005834842,4.496377e-7,0.0002164172,0.0001148536,0.9018876,0.09410964,0.001393486,0.0001548678],"study_design_scores_gemma":[0.00126824,0.0002397472,0.001128809,0.0004355836,0.0003723699,0.00005002308,0.000330227,0.07644117,0.914483,0.003891805,0.0006834614,0.0006755854],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9944658,0.00009063598,0.0005641269,0.0001977076,0.0003784721,0.0006385029,0.0000563927,0.0005961438,0.003012198],"genre_scores_gemma":[0.7900196,0.00004828885,0.2092921,0.00006505413,0.0003089947,0.00009870069,0.000005449875,0.0001236245,0.00003814204],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.208728,"threshold_uncertainty_score":0.9997973,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01734044264717422,"score_gpt":0.2201650258273539,"score_spread":0.2028245831801797,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}