{"id":"W2053026278","doi":"10.1117/12.876234","title":"Bimetallic grayscale photomasks written using optical density feedback control","year":2011,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Grayscale; Laser; Computer science; Photomask; Pixel; Optics; Raster graphics; Laser power scaling; Brightness; Materials science; Artificial intelligence; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001365429,0.0002479794,0.0001655268,0.000256553,0.0001409352,0.0003461437,0.0005067359,0.0002345038,0.001545355],"category_scores_gemma":[0.0005203315,0.0002161175,0.00008397722,0.000221843,0.0002273,0.0003465066,0.00027286,0.0002222241,0.0002256987],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005115697,"about_ca_system_score_gemma":0.000198433,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009324094,"about_ca_topic_score_gemma":0.001802414,"domain_scores_codex":[0.9997776,0.00001271137,0.00001177681,0.00005758676,0.0001181206,0.00002223441],"domain_scores_gemma":[0.999724,0.00005852653,0.00009512893,0.00004841772,0.00005662716,0.00001737266],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005462069,0.00002862991,0.0001943076,0.00003648154,0.000003149553,0.00004083433,0.00004013643,0.001013348,0.9832581,0.0003720074,0.0001708984,0.01478756],"study_design_scores_gemma":[0.0000101093,0.0000877838,0.001027143,0.000002851224,0.000004516213,0.00006863943,0.00001179888,0.01745969,0.979785,0.0001117076,0.001419958,0.00001067334],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.9337873,0.0002437927,0.05838238,0.0001755181,0.00009386754,0.00006827277,0.0002059464,0.002072125,0.004970808],"genre_scores_gemma":[0.951001,0.0001088101,0.04497569,0.00004606702,0.00001181656,0.00004031025,0.00006597141,0.00005555885,0.003694818],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.001545355,"threshold_uncertainty_score":0.005169749,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01734044264717422,"score_gpt":0.2201650258273539,"score_spread":0.2028245831801797,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}